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Volumn 203, Issue 8, 2009, Pages 1055-1058
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High-repetition rate pulsed laser deposition of ZrC thin films
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Author keywords
Hard coatings; Pulsed laser deposition; Thin films; ZrC
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Indexed keywords
AUGER ELECTRON SPECTROSCOPY;
CARBIDES;
DEPOSITION RATES;
EXCIMER LASERS;
HARD COATINGS;
PULSED LASER DEPOSITION;
PULSED LASERS;
SCANNING ELECTRON MICROSCOPY;
SUBSTRATES;
TEXTURES;
X RAY DIFFRACTION;
ZIRCONIUM COMPOUNDS;
AS-DEPOSITED FILMS;
AUGER ELECTRON SPECTROSCOPIES (AES);
HIGH REPETITION RATE;
OXYGEN CONCENTRATIONS;
SUBSTRATE TEMPERATURE;
SURFACE ELEMENTAL COMPOSITIONS;
X RAY REFLECTIVITY;
X-RAY DIFFRACTION INVESTIGATIONS;
THIN FILMS;
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EID: 57549118902
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2008.09.039 Document Type: Article |
Times cited : (8)
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References (27)
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