Microstructure and mechanical properties of Mo-Si-C and Zr-Si-C thin films: Compositional routes for film densification and hardness enhancement

Surface and Coatings Technology

Volumn 201, Issue 6, 2006, Pages 2942-2952

  Krzanowski, James E ^a   Wormwood, Jonathan ^a  

^a University of New Hampshire   (United States)

Author keywords

Carbides; Hard coatings; Hardness; Magnetron sputtering; Nano indentation

Indexed keywords

DENSIFICATION; HARDNESS TESTING; INDENTATION; MECHANICAL PROPERTIES; METALLOGRAPHIC MICROSTRUCTURE; MOLYBDENUM ALLOYS; SILICON CARBIDE; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY; ZIRCONIUM ALLOYS;

HARD COATINGS; NANOCRYSTALLINE GRAIN STRUCTURE; NANOINDENTATION;

THIN FILMS;

DENSIFICATION; HARDNESS TESTING; INDENTATION; MECHANICAL PROPERTIES; METALLOGRAPHIC MICROSTRUCTURE; MOLYBDENUM ALLOYS; SILICON CARBIDE; THIN FILMS; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY; ZIRCONIUM ALLOYS;

EID: 33750980675     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.06.005     Document Type: Article

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