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Volumn 515, Issue 11, 2007, Pages 4636-4639
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Pulsed laser deposition of crystalline ZrC thin films
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Author keywords
Laser ablation; Refractive coatings; Thin films; ZrC
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Indexed keywords
AUGER ELECTRON SPECTROSCOPY;
CRYSTALLINE MATERIALS;
LASER ABLATION;
PULSED LASER DEPOSITION;
SUBSTRATES;
X RAY PHOTOELECTRON SPECTROSCOPY;
ZIRCONIUM COMPOUNDS;
CRYSTALLINE FILMS;
REFRACTIVE COATINGS;
SILICON SUBSTRATES;
SPECTROSCOPIC ELLIPSOMETRY;
THIN FILMS;
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EID: 33847169082
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2006.11.122 Document Type: Article |
Times cited : (19)
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References (12)
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