Precision tracking control of a biaxial piezo stage using repetitive control and double-feedforward compensation

Mechatronics

Volumn 21, Issue 1, 2011, Pages 239-249

  Lin, Chi Ying ^a   Chen, Po Ying ^a  

^a NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

Feedforward compensation; Prandtl Ishlinskii operator; Repetitive controller; Tracking control; XY piezo stage

Indexed keywords

BENCHMARKING; ERROR COMPENSATION; LEAF SPRINGS; NAVIGATION; PIEZOELECTRIC ACTUATORS; PROPORTIONAL CONTROL SYSTEMS; TWO TERM CONTROL SYSTEMS;

FEED-FORWARD COMPENSATION; PIEZO STAGE; PRANDTL-ISHLINSKII OPERATOR; REPETITIVE CONTROLLER; TRACKING CONTROLS;

CONTROLLERS;

EID: 79551481879     PISSN: 09574158     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mechatronics.2010.11.002     Document Type: Article

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