Construction and testing of a nanomachining instrument

Precision Engineering

Volumn 24, Issue 4, 2000, Pages 320-328

  Gao, Wei ^a   Hocken, Robert J ^b   Patten, John A ^b   Lovingood, John ^b   Lucca, Don A ^c  

^a TOHOKU UNIVERSITY   (Japan)

^b University of North Carolina at Charlotte   (United States)

^c Oklahoma State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FORCE MEASUREMENT; IMAGING SYSTEMS; NANOTECHNOLOGY; OPTICAL MICROSCOPY; PIEZOELECTRIC DEVICES; SCANNING ELECTRON MICROSCOPY; SENSORS;

IMAGE INDENTATION; NANOMACHINING; PIEZOELECTRIC TUBE SCANNER;

MACHINING;

EID: 0034291613     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0141-6359(00)00042-8     Document Type: Article

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