Architectures for tracking control in atomic force microscopes

IFAC Proceedings Volumes (IFAC-PapersOnline)

Volumn 17, Issue 1 PART 1, 2008, Pages

  Butterworth, Jeffrey Austin ^a   Pao, Lucy Y ^a   Abramovitch, Daniel Y ^a  

^a NONE

Author keywords

Identification and control methods; Mechatronic systems; Microsystems; Nano and micro technologies

Indexed keywords

ATOMIC FORCE MICROSCOPES; CLOSED-LOOP; CONTROL ARCHITECTURE; FEED-BACK LOOP; FEEDBACK CONTROLLER; FEEDFORWARD FILTERS; IDENTIFICATION AND CONTROL METHODS; MECHATRONIC SYSTEMS; NANO- AND MICRO-TECHNOLOGIES; PLANT UNCERTAINTY; RASTER SCANS; REFERENCE INPUTS; TRACKING CONTROLS; TRACKING PERFORMANCE;

DECISION FEEDBACK EQUALIZERS; IDENTIFICATION (CONTROL SYSTEMS); MECHATRONICS; MICROSYSTEMS;

FEEDBACK;

EID: 79961018629     PISSN: 14746670     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.3182/20080706-5-KR-1001.0876     Document Type: Conference Paper

References (45)

1. D. Y. Abramovitch, S. B. Andersson, L. Y. Pao, and G. Schitter. A tutorial on the mechanisms, dynamics, and control of atomic force microscopes. In Proc. Amer. Ctrl. Conf., pages 3488-3502, July 2007.
2. T. Ando, N.Kodera, E. Takai, D. Maruyama, K. Saito, and A. Toda. A high-speed atomic force microscope for studying biological macromolecules. Proc. Nat. Acad. of Sci., 98(22):12468-12472, Oct. 2001.
3. K. J. Astrom and T. Hagglund. Advanced PID Control. ISA Press, 2005.
4. B. Bhikkaji, M. Ratnam, A. Fleming, and S. O. R. Moheimani. Highperformance control of piezoelectric tube scanners. IEEE Trans. Ctrl. Sys. Tech., 15(5):853-866, Sept. 2007.
5. G. Binning and D. P. E. Smith. Single-tube three dimensional scanner for scanning tunneling microscopy. Rev. Sci. Instr., 57 (8):1688-1689, March 1986.
6. J. A. Butterworth, L. Y. Pao, and D. Y. Abramovitch. The effect of nonminimum-phase zero locations on the performance of feedforward model-inverse control techniques in discrete-time systems. In Proc. Amer. Ctrl. Conf., June 2008.
7. D. Croft and S. Devasia. Vibration compensation for high speed scanning tunneling microscopy. Rev. Sci. Instr., 70(12):4600-4605, Dec. 1999.
8. D. Croft, G. Shedd, and S. Devasia. Creep, hysteresis, and vibration compensation for piezoactuators: Atomic force microscopy application. ASME J. Dyn. Sys., Meas., & Ctrl., 123:35-43, March 2001.
9. S. Devasia, D. Chen, and B. Paden. Nonlinear inversion-based output tracking. IEEE Trans. Auto. Ctrl., 41(7):930-942, July 1996.
10. F. El Feninat, T. H. Ellis, E. Sacher, and I. Stangel. A tapping mode AFM study of collapse and denaturation in dentinal collagen. Dental Materials, 17:248-288, 2001.
11. O. M. El Rifai and K. Youcef-Toumi. Design and control of atomic force microscopes. In Proc. Amer. Ctrl. Conf., pages 3714-3719, June 2003.
12. E. Gross and M. Tomizuka. Experimental beam tip tracking control with a truncated series approximation to uncancelable dynamics. IEEE Trans. Ctrl. Sys. Tech., 2(4):382-391, Dec. 1994.
13. E. Gross, M. Tomizuka, and W. Messner. Cancellation of discrete time unstable zeros by feedforward control. ASME J. Dyn. Sys., Meas., & Ctrl., 116:33-38, March 1994.
14. B. Haack and M. Tomizuka. The effect of adding zeros to feedforward controllers. ASME J. Dyn. Sys., Meas., & Ctrl., 113(4):6-10, March 1991.
15. L. R. Hunt, G. Meyer, and R. Su. Noncausal inverses for linear systems. IEEE Trans. Auto. Ctrl., 41(4):608-611, April 1996.
16. N. Kodera, H. Yamashita, and T. Ando. Active damping of the scanner for high-speed atomic force microscopy. Rev. Sci. Instr., 76:0537081-537085, May 2005.
17. N. Kodera, H. Yamashita, and T. Ando. Dynamic proportionalintegral- differential controller for high-speed atomic force microscopy. Rev. Sci. Instr., 77:0837041-837047, Aug. 2006.
18. K. K. Leang and S. Devasia. Feedback-linearized inverse feedforward for creep, hysteresis, and vibration compensation in AFM piezoactuators. IEEE Trans. Ctrl. Sys. Tech., 15(5):927-935, Sept. 2007.
19. Y. Li and J. Bechhoefer. Feedforward control of a closed-loop piezoelectric translation stage for atomic force microscope. Rev. Sci. Instr., 78:013702-1-8, Jan. 2007.
20. L. Y. Pao, J. A. Butterworth, and D. Y. Abramovitch. Combined feedforward/feedback control of atomic force microscopes. In Proc. Amer. Ctrl. Conf., pages 3509-3515, July 2007.
21. B. Potsaid and J. T.Wen. High performance motion tracking control. In Proc. IEEE Int. Conf. Ctrl. Apps., pages 718-723, Sept. 2004.
22. B. Potsaid, J. T. Wen, M. Unrath, D. Watt, and M. Alpay. High performance motion tracking control for electronic manufacturing. ASME J. Dyn. Sys., Meas., & Ctrl., 129:767-776, Nov. 2007.
23. J. M. Rieber, G. Schitter, A. Stemmer, and F. Allg ower. Experimental application of l1-optimal control in atomic force microscopy. In Proc. IFAC World Cong., pages 718-723, July 2005.
24. B. P. Rigney, L. Y. Pao, and D. A. Lawrence. Model inversion architectures for settle time applications with uncertainty. In Proc. IEEE Conf. Dec. & Ctrl., pages 6518-6524, Dec. 2006a.
25. B. P. Rigney, L. Y. Pao, and D. A. Lawrence. Settle-time performance comparisons of approximate inversion techniques for LTI nonminimum phase systems. In Proc. Amer. Ctrl. Conf., pages 600-605, June 2006b.
26. B. P. Rigney, L. Y. Pao, and D. A. Lawrence. Nonminimum phase dynamic inversion for settle time applications. Provisionally accepted for publication in: IEEE Trans. Ctrl. Sys. Tech., 2008. Pre-print available here: http://ece.colorado.edu/-pao/journals.html.
27. S. M. Salapaka, A. Sebastian, J. P. Cleveland, and M. V. Salapaka. High bandwidth nano-positioner: A robust control approach. Rev. Sci. Instr., 15:3232-3241, Sept. 2002.
28. S. M. Salapaka, T. De, and A. Sebastian. A robust control based solution to the sample-profile estimation problem in fast atomic force microscopy. Int. J. Robust & Nonlin. Ctrl., 15:821-837, 2005.
29. G. Schitter, P. Menold, H. F. Knapp, F. R. Allgower, and A. Stemmer. High performance feedback for fast scanning atomic force microscopes. IEEE Tran. Ctrl. Sys. Tech., 72(8):3320-3327, Aug. 2001.
30. G. Schitter, A. Stemmer, and F. Allgower. Robust 2DOF-control of a piezoelectric tube scanner for high speed atomic force microscopy. In Proc. Amer. Ctrl. Conf., pages 3720-3725, June 2003.
31. G. Schitter, R. W. Stark, and A. Stemmer. Identification and openloop tracking control of a piezoelectric tube scanner for high-speed scanning-probe microscopy. IEEE Trans. Ctrl. Sys. Tech., 12(3): 449-454, May 2004a.
32. G. Schitter, R.W. Stark, and A. Stemmer. Fast contact-mode atomic force microscopy on biological specimen by model-based control. Ultramicroscopy, 100:253-257, 2004b.
33. G. Schitter, G. E. Fantner, P. J. Thurner, J. Adams, and P. K. Hansma. Design and characterization of a novel scanner for highspeed atomic force microscopy. In IFAC Symp. on Mechatronic Sys., pages 819-824, Sept. 2006.
34. A. Sebastian and S. M. Salapaka. Design methodologies for robust nano-positioning. IEEE Trans. Ctrl. Sys. Tech., 13:868-876, Nov. 2005.
35. A. Sebastian, A. Gannepalli, and M. V. Salapaka. A review of the systems approach to the analysis of dynamic-mode atomic force microscopy. IEEE Trans. Ctrl. Sys. Tech., 15(5):952-959, Sept. 2007.
36. Z. Shao, J. Mou, D. M. Czajkowsky, J. Yang, and J.-Y. Yuan. Biological atomic force microscopy: What is achieved and what is needed. Adv. Physics, 45(1):1-86, 1996.
37. S. Skogestad and I. Postlethwaite. Multivariable Feedback Control: Analysis and Design. John Wiley and Sons, Ltd., 2nd edition, 2005.
38. A. Stemmer, G. Schitter, J. M. Rieber, and F. Allgower. Control strategies towards faster quantitative imaging in atomic force microscopy. Euro. J. Ctrl., 11(4 5):384-395, 2005.
39. S. Tien, Q. Zou, and S. Devasia. Iterative control of dynamicscoupling-caused errors in piezoscanners during high-speed AFM operation. IEEE Trans. Ctrl. Sys. Tech., 13(6):921-931, Nov. 2005.
40. M. Tomizuka. Zero phase error tracking algorithm for digital control. ASME J. Dyn. Sys., Meas., & Ctrl., 109:65-68, March 1987.
41. D. E. Torfs, J. De Schutter, and J. Swevers. Extended bandwidth zero phase error tracking control of nonminimal phase systems. ASME J. Dyn. Sys., Meas., & Ctrl., 114:347-351, Sept. 1992.
42. D. E. Torfs, R. Vuerinckx, J. Swevers, and J. Schoukens. Comparison of two feedforward design methods aiming at accurate trajectory tracking of the end point of a flexible robot arm. IEEE Trans. Ctrl. Sys. Tech., 6(1):2-14, Jan. 1998.
43. J. T. Wen and B. Potsaid. An experimental study of a high performance motion control system. In Proc. Amer. Ctrl. Conf., pages 5158-5163, June 2004.
44. Y. Wu and Q. Zou. Iterative control approach to compensate for the hysteresis and the vibrational dynamics effects of piezo actuators. In Proc. Amer. Ctrl. Conf., pages 424-429, June 2006.
45. Q. Zou and S. Devasia. Preview-based optimal inversion for output tracking: Application to scanning tunneling microscopy. IEEE Trans. Ctrl. Sys. Tech., 12(3):375-386, May 2004.