메뉴 건너뛰기




Volumn 33, Issue 1, 2009, Pages 18-25

Design and testing of a long-range, precision fast tool servo system for diamond turning

Author keywords

Damping; Diamond turning; Fast tool servo; Feedforward; Flexure mechanism; PID controller; Voice coil actuator

Indexed keywords

ACTUATORS; CUTTING TOOLS; DAMPING; DIAMONDS; DISTURBANCE REJECTION; ELECTROMECHANICAL DEVICES; FEEDBACK; FEEDBACK CONTROL; INTERFEROMETERS; MACHINE TOOLS; MECHANISMS; METAL WORKING TOOLS; PROPORTIONAL CONTROL SYSTEMS; SPACECRAFT INSTRUMENTS; SURFACES; TURNING;

EID: 55949091708     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2008.03.001     Document Type: Article
Times cited : (112)

References (28)
  • 1
    • 0000215664 scopus 로고
    • Design and testing of a fast tool servo for diamond turning
    • Patterson S.R., and Magreb E.B. Design and testing of a fast tool servo for diamond turning. Precis Eng 7 3 (1985) 123-128
    • (1985) Precis Eng , vol.7 , Issue.3 , pp. 123-128
    • Patterson, S.R.1    Magreb, E.B.2
  • 2
    • 0032683313 scopus 로고    scopus 로고
    • Manufacturing and applications of non-rotationally symmetric optics
    • Weck M., Klocke F., Oezmeral H., Hennig J., Ruebenach O., Ehl M., et al. Manufacturing and applications of non-rotationally symmetric optics. Proc SPIE 3739 (1999) 94-107
    • (1999) Proc SPIE , vol.3739 , pp. 94-107
    • Weck, M.1    Klocke, F.2    Oezmeral, H.3    Hennig, J.4    Ruebenach, O.5    Ehl, M.6
  • 3
    • 9944244256 scopus 로고
    • Direct machining of a non-axisymmetric phase corrector
    • Schenz R.F., Patterson S.R., and Saito T.T. Direct machining of a non-axisymmetric phase corrector. Proc SPIE 966 (1988) 43-59
    • (1988) Proc SPIE , vol.966 , pp. 43-59
    • Schenz, R.F.1    Patterson, S.R.2    Saito, T.T.3
  • 4
    • 0026239438 scopus 로고
    • Application of a fast tool servo for diamond turning of nonrotationally symmetric surfaces
    • Dow T.A., Miller M.H., and Falter P.J. Application of a fast tool servo for diamond turning of nonrotationally symmetric surfaces. Precis Eng 13 4 (1991) 243-250
    • (1991) Precis Eng , vol.13 , Issue.4 , pp. 243-250
    • Dow, T.A.1    Miller, M.H.2    Falter, P.J.3
  • 5
    • 81255124609 scopus 로고    scopus 로고
    • Machining of freeform optical surfaces by slow slide servo method
    • Tohme Y.F., and Lowe J.A. Machining of freeform optical surfaces by slow slide servo method. Proc ASPE (2001)
    • (2001) Proc ASPE
    • Tohme, Y.F.1    Lowe, J.A.2
  • 6
    • 0027149073 scopus 로고
    • Fabrication of pure silica micro-optics by sol-gel process
    • Nogues J.R., and Howell R.L. Fabrication of pure silica micro-optics by sol-gel process. Proc SPIE 1993 (1751) 214-224
    • (1751) Proc SPIE , vol.1993 , pp. 214-224
    • Nogues, J.R.1    Howell, R.L.2
  • 7
    • 0022027550 scopus 로고
    • Computer simulation of stick-slip friction in mechanical dynamic systems
    • Karnopp D. Computer simulation of stick-slip friction in mechanical dynamic systems. ASME J Dyn Syst Meas Control 107 (1985) 100-103
    • (1985) ASME J Dyn Syst Meas Control , vol.107 , pp. 100-103
    • Karnopp, D.1
  • 9
    • 18344373686 scopus 로고    scopus 로고
    • Rotational flexures deliver high precision
    • O'Brien B. Rotational flexures deliver high precision. Laser Focus World 41 4 (2005) 89-92
    • (2005) Laser Focus World , vol.41 , Issue.4 , pp. 89-92
    • O'Brien, B.1
  • 10
    • 14944351794 scopus 로고    scopus 로고
    • Design and development of a toroidal flexure for extended motion applications
    • Cuttino J.F., van Dijck B., and Brown A. Design and development of a toroidal flexure for extended motion applications. Precis Eng 29 2 (2002) 135-145
    • (2002) Precis Eng , vol.29 , Issue.2 , pp. 135-145
    • Cuttino, J.F.1    van Dijck, B.2    Brown, A.3
  • 12
    • 0002199949 scopus 로고    scopus 로고
    • Creep hysteresis, and vibration compensation for piezoactuators: atomic force microscopy application
    • Croft D., Shed G., and Devasia S. Creep hysteresis, and vibration compensation for piezoactuators: atomic force microscopy application. ASME J Dyn Sys Meas Control 123 1 (2001) 35-43
    • (2001) ASME J Dyn Sys Meas Control , vol.123 , Issue.1 , pp. 35-43
    • Croft, D.1    Shed, G.2    Devasia, S.3
  • 13
    • 0029370430 scopus 로고
    • Precision position control of piezoelectric actuators using charge feedback
    • Main J.A., Garcia E., and Newton D.V. Precision position control of piezoelectric actuators using charge feedback. AIAA J Guid Control Dyn 18 5 (1995) 1068-1073
    • (1995) AIAA J Guid Control Dyn , vol.18 , Issue.5 , pp. 1068-1073
    • Main, J.A.1    Garcia, E.2    Newton, D.V.3
  • 14
    • 22944475297 scopus 로고    scopus 로고
    • A grounded load charge amplifier for reducing hysteresis in piezoelectric tube scanners
    • Fleming A.J., and Moheimani S.O.R. A grounded load charge amplifier for reducing hysteresis in piezoelectric tube scanners. Rev Sci Instrum 76 7 (2005) 073707
    • (2005) Rev Sci Instrum , vol.76 , Issue.7 , pp. 073707
    • Fleming, A.J.1    Moheimani, S.O.R.2
  • 15
    • 55949090210 scopus 로고    scopus 로고
    • Development of a high bandwidth, high power, linear amplifier for a precision fast tool servo system
    • Rakuff S., Cuttino J.F., and Schinstock D.E. Development of a high bandwidth, high power, linear amplifier for a precision fast tool servo system. Proc Spring Topical ASPE (2001) 88-93
    • (2001) Proc Spring Topical ASPE , pp. 88-93
    • Rakuff, S.1    Cuttino, J.F.2    Schinstock, D.E.3
  • 16
    • 55949129006 scopus 로고    scopus 로고
    • Rakuff S. Development of a precision long-range fast tool servo system for diamond turning. Ph.D. dissertation Charlotte, NC: University of North Carolina at Charlotte; 2005.
    • Rakuff S. Development of a precision long-range fast tool servo system for diamond turning. Ph.D. dissertation Charlotte, NC: University of North Carolina at Charlotte; 2005.
  • 18
    • 0035737040 scopus 로고    scopus 로고
    • Adaptive robust precision motion control of linear motors with negligible electrical dynamics: theory and experiments
    • Xu L., and Yao B. Adaptive robust precision motion control of linear motors with negligible electrical dynamics: theory and experiments. IEEE/ASME Trans Mechatron 6 4 (2001) 444-452
    • (2001) IEEE/ASME Trans Mechatron , vol.6 , Issue.4 , pp. 444-452
    • Xu, L.1    Yao, B.2
  • 19
    • 0029190458 scopus 로고
    • Optimal feedforward tracking control of linear motors for machine tool drives
    • Alter D.M., and Tsao T.C. Optimal feedforward tracking control of linear motors for machine tool drives. Proc Am Control Conf 1 (1995) 210-214
    • (1995) Proc Am Control Conf , vol.1 , pp. 210-214
    • Alter, D.M.1    Tsao, T.C.2
  • 21
    • 0025399559 scopus 로고
    • Preshaping command inputs to reduce system vibration
    • Singer N.C., and Seering W.P. Preshaping command inputs to reduce system vibration. ASME J Dyn Syst Meas Control 112 1 (1990) 76-82
    • (1990) ASME J Dyn Syst Meas Control , vol.112 , Issue.1 , pp. 76-82
    • Singer, N.C.1    Seering, W.P.2
  • 22
    • 0002882766 scopus 로고    scopus 로고
    • Robust input shaper control design for parameter variations in flexible structures
    • Pao L.Y., and Lau M.A. Robust input shaper control design for parameter variations in flexible structures. ASME J Dyn Syst Meas Control 122 (2001) 63-70
    • (2001) ASME J Dyn Syst Meas Control , vol.122 , pp. 63-70
    • Pao, L.Y.1    Lau, M.A.2
  • 23
    • 14644444208 scopus 로고    scopus 로고
    • Passive vibration control via electromagnetic shunt damping
    • Behrens S., Fleming A.J., and Moheimani S.O.R. Passive vibration control via electromagnetic shunt damping. IEEE/ASME Trans Mechatron 10 1 (2005) 118-122
    • (2005) IEEE/ASME Trans Mechatron , vol.10 , Issue.1 , pp. 118-122
    • Behrens, S.1    Fleming, A.J.2    Moheimani, S.O.R.3
  • 24
    • 33745611090 scopus 로고    scopus 로고
    • Development of a new passive-active magnetic damper for vibration suppression
    • Sodano H.A., Inman D.J., and Belvin W.K. Development of a new passive-active magnetic damper for vibration suppression. ASME J Sound Vib 128 (2006) 318-327
    • (2006) ASME J Sound Vib , vol.128 , pp. 318-327
    • Sodano, H.A.1    Inman, D.J.2    Belvin, W.K.3
  • 25
    • 0037904245 scopus 로고    scopus 로고
    • Recent applications of viscoelastic damping for noise control in automobiles and commercial airplanes
    • Rao M.D. Recent applications of viscoelastic damping for noise control in automobiles and commercial airplanes. ASME J Sound Vib 262 (2003) 457-474
    • (2003) ASME J Sound Vib , vol.262 , pp. 457-474
    • Rao, M.D.1
  • 26
    • 0000511921 scopus 로고
    • Material damping: an introductory review of mathematical models, measures and experimental techniques
    • Bert C.W. Material damping: an introductory review of mathematical models, measures and experimental techniques. ASME J Sound Vib 29 (1973) 129-153
    • (1973) ASME J Sound Vib , vol.29 , pp. 129-153
    • Bert, C.W.1
  • 27
    • 55949123187 scopus 로고    scopus 로고
    • Seugling RM. Error compensation design for atomic scale microscopy. Ph.D. dissertation, Charlotte, NC: University of North Carolina at Charlotte; 2003.
    • Seugling RM. Error compensation design for atomic scale microscopy. Ph.D. dissertation, Charlotte, NC: University of North Carolina at Charlotte; 2003.
  • 28
    • 58149207306 scopus 로고
    • International status of thermal error research
    • Bryan J.B. International status of thermal error research. Ann CIRP 39 2 (1990) 645-657
    • (1990) Ann CIRP , vol.39 , Issue.2 , pp. 645-657
    • Bryan, J.B.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.