Precision positioning of a five degree-of-freedom planar motion stage

Mechatronics

Volumn 15, Issue 8, 2005, Pages 969-987

  Dejima, Shuichi ^a,c   Gao, Wei ^a   Shimizu, Hiroki ^a   Kiyono, Satoshi ^a   Tomita, Yoshiyuki ^b  

^a TOHOKU UNIVERSITY   (Japan)

^b SUMITOMO HEAVY INDUSTRIES LTD   (Japan)

^c OSAKA UNIVERSITY   (Japan)

Author keywords

Five degree of freedom; Planar motion stage; Precision positioning; Surface encoder

Indexed keywords

ACTUATORS; ANGLE MEASUREMENT; CONTROL EQUIPMENT; ELECTRIC CONTACTORS; FEEDBACK CONTROL; MOTION CONTROL; PIEZOELECTRIC TRANSDUCERS; SENSORS;

CONTROLLER SWITCHING METHOD; DISCRETE-TIME SLIDING-MODE CONTROL; SINGLE-LEVEL MOVING ELEMENT; SURFACE ENCODERS;

DEGREES OF FREEDOM (MECHANICS);

EID: 23744487355     PISSN: 09574158     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mechatronics.2005.03.002     Document Type: Article

References (16)

1. C.W. Lee, and S.W. Kim An ultraprecision stage for alignment of wafers in advanced microlithography Precis Eng 21 2/3 1997 113 122
2. K.S. Jung, and Y.S. Baek Development of a novel maglev positioner with self-stabilizing property Mechatronics 12 2002 771 790
3. H.V. Brussel, D. Reynaerts, P. Vanherck, M. Versteyhe, and S. Devos A nanometre-precision, ultra-stiff piezostepper stage for ELID-grinding Ann CIRP 52 1 2003 317 322
4. W.J. Kim, and D.L. Trumper Linear motor-levitated stage for photolithography Ann CIRP 46 1 1997 447 450
5. E. Shamoto, M. Murase, and T. Moriwaki Ultra-precision 6-axis table driven by means of walking drive Ann CIRP 49 1 2000 299 302
6. R. Hocken, D. Trumper, and C. Wang Dynamics and control of the UNCC/MIT sub-atomic measuring machine Ann CIRP 50 1 2001 373 376
7. S.Q. Lee, and D.G. Gweon A new 3-DOF Z-tilts micropositioning system using electromagnetic actuators and air bearings Precis Eng 24 1 2000 24 31
8. Y. Tomita, and Y. Koyanagawa Study on a surface-motor driven precise positioning system Trans ASME J Dyn Syst Measur Contr 117 1995 311 319
9. Y. Tomita, M. Sugimine, and Y. Koyanagawa Development of six-axis precise positioning system driven by surface motor Trans JSME 62 1996 192 199
10. H. Kunzmann, T. Pfeifer, and J. Flugge Scales vs. laser interferometers performance and comparison of two measuring systems Ann CIRP 42 2 1993 753 757
11. S. Kiyono, P. Cai, and W. Gao An angle-based position detection method for precision machines Int J JSME C 42 1 1999 44 48
12. W. Gao, S. Dejima, Y. Shimizu, and S. Kiyono Precision measurement of two-axis positions and tilt motions using a surface encoder Ann CIRP 52 1 2003 435 438
13. W. Gao, T. Araki, S. Kiyono, Y. Okazaki, and M. Yamanaka Precision nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder Precis Eng 27 3 2003 289 298
14. z Surface encoder for precision positioning Precis Eng 28 3 2004 329 337
15. F. Jenkins, and H. White Fundamentals of optics 4th ed. 1981 McGraw-Hill
16. W. Gao, P.S. Huang, T. Yamada, and S. Kiyono A compact and sensitive two-dimensional angle probe for flatness measurement of large silicon wafers Precis Eng 26 4 2002 396 404