Nano-precision dynamic motion control

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6648, Issue , 2007, Pages

  Lin, Chi Ying ^a   Tsao, Tsu Chin ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Dynamic motion control; Nano precision; Repetitive control

Indexed keywords

ALGORITHMS; DYNAMIC PROGRAMMING; MOTION CONTROL; PIEZOELECTRIC ACTUATORS; ROBUST CONTROL;

DYNAMIC MOTION CONTROL; NANOPRECISION; REPETITIVE CONTROL; ROBUST FEEDBACK;

NANOTECHNOLOGY;

EID: 42149176857     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.738689     Document Type: Conference Paper

References (11)

1. M. D. Dickey and C.G. Wilson, "Kinetic parameters for step and flash imprint lithography photopolymerization," American Institute of Chemical Engineers 52, pp. 777-784, February 2006.
2. 2 static random access memory patterns by nanoimprint lithography," Nanotechnology 16, pp. 1058-1061, 2005.
3. Y. Chen, G. Jung, D. A. A. Ohlberg, X. Li, D. Stewart, J. O. Jeppesen, K. A. Nielsen, J. F. Stoddart, and R. S. Williams, "Nanoscale molecular-switch crossbar circuits," Nanotechnology 14, pp. 462-468, 2003.
4. C. Stuart, Q. Xu, R. J. Tseng, Y. Yang, H. T. Hahn, Y. Chen, W. Wu, and R. S. Williams, "Nanofabrication module integrated with optical aligner," Journal of Vacuum Science & Technology B: Microelectrics and Nanometer structures 24, pp. 539-542, 2006.
5. Z.-W. Liu, Q.-H. Wei, and X. Zhang, "Surface plasmon interference nanolithography," Nano Letters 5, pp. 957-961, 2006.
6. K. Salaita, S. Lee, X. Wang, L. Huang, T. Dellinger, C. Liu, and C. Mirkin, "Sub-100 nm, centimeter-scale, parallel dip-pen nanolithography," Small 10, pp. 940-945, 2005.
7. S. Skogestad and I. Postlethwaite, Multivariable Feedback Control - Analysis and Design, John Wiley & Sons, 1996.
8. M. Tomizuka, "Zero phase error tracking algorithm for digital control," ASME Journal of Dynamic Systems, Measurement, and Control 109, pp. 65-68, March 1987.
9. T.-C. Tsao, "Optimal feed-forward digital tracking controller design," ASME Journal of Dynamic Systems, Measurement, and Control 116, pp. 583-592, December 1994.
10. M. Tomizuka, T.-C. Tsao, and K.-K. Chew, "Analysis and synthesis of discrete-time repetitive controllers," ASME Journal of Dynamic Systems, Measurement, and Control 111, pp. 353-358, September 1989.
11. J. Li and T.-C. Tsao, "Robust performance repetitive control systems," ASME Journal of Dynamic Systems, Measurement, and Control 123, pp. 330-337, sepetmber 2001.