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Physica Status Solidi (B) Basic Research

Volumn 248, Issue 2, 2011, Pages 323-326

Characterization of group II hafnates and zirconates for metal-insulator-metal capacitors

(9) Lupina, Grzegorz a Seifarth, Olaf a Dudek, Piotr a Kozlowski, Grzegorz a Dabrowski, Jarek a Thieme, Hans Jürgen a Lippert, Gunther a Schroeder, Thomas a Müssig, Hans Joachim a

a IHP (Germany)

Author keywords

Dielectric thin films; High k capacitors; X ray absorption spectroscopy

Indexed keywords

EID: 79251516138 PISSN: 03701972 EISSN: 15213951 Source Type: Journal
DOI: 10.1002/pssb.201046456 Document Type: Article

Times cited : (17)

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