X-ray absorption spectroscopy study on oxygen-deficient hafnium oxide film

Journal of Physics: Conference Series

Volumn 100, Issue PART 4, 2008, Pages

  Cho, D Y ^a   Min, C H ^b   Kim, J Y ^c   Park, J H ^c   Oh, S J ^b   Hwang, C S ^a  

^a Seoul National University   (South Korea)

^b Seoul National University   (South Korea)

^c Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BOND LENGTH; DICHROISM; HAFNIUM; HAFNIUM OXIDES; MULTILAYERS; OXIDE FILMS; OXIDES; OXYGEN; X RAY ABSORPTION SPECTROSCOPY; NANOSCIENCE; OXYGEN VACANCIES; VACUUM APPLICATIONS; X RAYS;

ATOMIC DISTRIBUTION; EXTENDED X-RAY ABSORPTION FINE STRUCTURES; FERROMAGNETIC SPIN; INFLUENCE OF OXYGEN; LATTICE RELAXATION; MAGNETIC CIRCULAR DICHROISMS; OXYGEN DEFICIENT; SOFT X-RAY ABSORPTION SPECTROSCOPIES;

OXYGEN VACANCIES; HAFNIUM OXIDES;

EID: 77954324271     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/100/4/042044     Document Type: Conference Paper

References (4)

1. Cho D-Y, Min C-H, Kim J, Oh S-J and Kim M G 2006 Appl. Phys. Lett. 89 253510
2. Takeuchi H, Ha D and King T-J 2004 J. Vac. Sci. Technol. A 22 1337
3. Gavartin J L, Ramo D M, Shluger A L, Bersuker G and Lee B H 2006 Appl. Phys. Lett. 89 082908
4. Cho D-Y, Lee J-M, Oh S-J, Jang H, Kim J-Y, Park J-H and Tanaka A 2007 Phys. Rev. B 76 165411