Dielectric constant and leakage of BaZrO> films

Applied Physics Letters

Volumn 94, Issue 15, 2009, Pages

  Lupina G ^a   Dabrowski J ^a   Dudek, P ^a   Kozlowski G ^a   Zaumseil, P ^a   Lippert, G ^a   Fursenko, O ^a   Bauer, J ^a   Baristiran, C ^a   Costina, I ^a   Mussig H J ^a   Oberbeck, L ^b   Schroder U ^b  

^a IHP   (Germany)

^b QIMONDA DRESDEN GMBH AND CO OHG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AB-INITIO CALCULATIONS; AMORPHOUS LAYERS; CONDUCTIVE ATOMIC FORCE MICROSCOPIES; DIELECTRIC CONSTANTS; HOT SPOTS; OPTICAL BAND-GAP; PEROVSKITE LAYERS; POLY-CRYSTALLINE; POLYCRYSTALLINE FILMS; SECONDARY IONS;

CERAMIC CAPACITORS; DIELECTRIC MATERIALS; DIELECTRIC WAVEGUIDES; HIGH PERFORMANCE LIQUID CHROMATOGRAPHY; LEAKAGE CURRENTS; OXIDE MINERALS; PERMITTIVITY; PEROVSKITE; POINT DEFECTS; SECONDARY ION MASS SPECTROMETRY; TIN; TITANIUM COMPOUNDS; TITANIUM NITRIDE;

AMORPHOUS FILMS;

EID: 65249187699     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3110970     Document Type: Article

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