SCOPUS 정보 검색 플랫폼

Volumn 158, Issue 2, 2011, Pages

Removal of high-dose ion-implanted 248 nm deep UV photoresist using UV irradiation and organic solvent

(13) Tsvetanova, D a,b Vos, R a Vanstreels, K a Radisic, D a Sonnemans, R c Berry, I c Waldfried, C c Mattson, D c Deluca, J c Vereecke, G a Mertens, P W a Parac Vogt, T N b Heyns, M M a,b

a IMEC (Belgium)

b UNIVERSITY OF LEUVEN (Belgium)

c AXCELIS TECHNOLOGIES (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEEP UV PHOTORESISTS; FRONT END OF LINES; HIGH DOSE; LONG WAVELENGTH; LOW DOSE; NOVEL MATERIALS; OPTIMAL CONDITIONS; POST TREATMENT; POWER DENSITIES; PRE-TREATMENT; REMOVAL EFFICIENCIES; RESIDUE REMOVAL; RESIST LAYERS; SEMICONDUCTOR MANUFACTURING; SHORT WAVELENGTHS; SIGNIFICANT IMPACTS; UV IRRADIATION; UV WAVELENGTH; WET PROCESS;

PHOTORESISTS; REMOVAL; SOLUBILITY;

ORGANIC SOLVENTS;

EID: 78650744709 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.3524275 Document Type: Article

Times cited : (9)

References (19)

1
- 38549109555
- DDBPE8 1012-0394, 10.4028/www.scientific.net/SSP.134.113
- G. Mannaert, M. R. Baklanov, D. Goossens, J. Vertommen, and W. Boullart, Solid State Phenom. DDBPE8 1012-0394, 134, 113 (2008). 10.4028/www.scientific. net/SSP.134.113
- (2008) Solid State Phenom. , vol.134 , pp. 113
- Mannaert, G.¹ Baklanov, M.R.² Goossens, D.³ Vertommen, J.⁴ Boullart, W.⁵

2
- 44449095646
- JESOAN 0013-4651, 10.1149/1.2919115
- D. P. Brunco, B. De Jaeger, G. Eneman, J. Mitard, G. Hellings, A. Satta, V. Terzieva, L. Souriau, F. E. Leys, G. Pourtois, J. Electrochem. Soc. JESOAN 0013-4651, 155, H552 (2008). 10.1149/1.2919115
- (2008) J. Electrochem. Soc. , vol.155 , pp. 552
- Brunco, D.P.¹ De Jaeger, B.² Eneman, G.³ Mitard, J.⁴ Hellings, G.⁵ Satta, A.⁶ Terzieva, V.⁷ Souriau, L.⁸ Leys, F.E.⁹ Pourtois, G.¹⁰

3
- 70449489464
- DDBPE8 1012-0394, 10.4028/www.scientific.net/SSP.145-146.203
- S. Sioncke, D. P. Brunco, M. Meuris, O. Uwamahoro, J. Van Steenbergen, E. Vrancken, and M. M. Heyns, Solid State Phenom. DDBPE8 1012-0394, 145-146, 203 (2009). 10.4028/www.scientific.net/SSP.145-146.203
- (2009) Solid State Phenom. , vol.145-146 , pp. 203
- Sioncke, S.¹ Brunco, D.P.² Meuris, M.³ Uwamahoro, O.⁴ Van Steenbergen, J.⁵ Vrancken, E.⁶ Heyns, M.M.⁷

4
- 45249090596
- ECSTF8 1938-5862, 10.1149/1.2779567
- R. Vos, S. Arnauts, I. Bovie, B. Onsia, S. Garaud, K. Xu, Y. H. Yu, S. Kubicek, E. Rohr, T. Schram, ECS Trans. ECSTF8 1938-5862, 11 (4), 275 (2007). 10.1149/1.2779567
- (2007) ECS Trans. , vol.11 , Issue.4 , pp. 275
- Vos, R.¹ Arnauts, S.² Bovie, I.³ Onsia, B.⁴ Garaud, S.⁵ Xu, K.⁶ Yu, Y.H.⁷ Kubicek, S.⁸ Rohr, E.⁹ Schram, T.¹⁰

5
- 33744783987
- JESOAN 0013-4651, 10.1149/1.2195884
- P. M. Visintin, M. B. Korzenski, and T. H. Baum, J. Electrochem. Soc. JESOAN 0013-4651, 153, G591 (2006). 10.1149/1.2195884
- (2006) J. Electrochem. Soc. , vol.153 , pp. 591
- Visintin, P.M.¹ Korzenski, M.B.² Baum, T.H.³

6
- 74949130282
- DDBPE8 1012-0394, 10.4028/www.scientific.net/SSP.145-146.253
- G. Mannaert, L. Witters, D. Shamiryan, W. Boullart, K. Han, S. Luo, A. Falepin, R. Sonnemans, I. Berry, and C. Waldfried, Solid State Phenom. DDBPE8 1012-0394, 145-146, 253 (2009). 10.4028/www.scientific.net/SSP.145-146.253
- (2009) Solid State Phenom. , vol.145-146 , pp. 253
- Mannaert, G.¹ Witters, L.² Shamiryan, D.³ Boullart, W.⁴ Han, K.⁵ Luo, S.⁶ Falepin, A.⁷ Sonnemans, R.⁸ Berry, I.⁹ Waldfried, C.¹⁰

7
- 78650723005
- 1st Workshoon PESM 2007 , last accessed: 06/12/2010.
- K. Han, S. Luo, P. Geissbühler, Q. Han, I. Berry, R. Sonnemans, V. Grimm, and C. Krueger, 1st Workshop on PESM 2007 (http://www.pesm2007.be/11.pdf) , last accessed: 06/12/2010.
- Han, K.¹ Luo, S.² Geissbühler, P.³ Han, Q.⁴ Berry, I.⁵ Sonnemans, R.⁶ Grimm, V.⁷ Krueger, C.⁸

8
- 70449508583
- DDBPE8 1012-0394, 10.4028/www.scientific.net/SSP.145-146.249
- K. Han, S. Luo, O. Escorcia, C. Waldfried, and I. Berry, Solid State Phenom. DDBPE8 1012-0394, 145-146, 249 (2009). 10.4028/www.scientific.net/SSP. 145-146.249
- (2009) Solid State Phenom. , vol.145-146 , pp. 249
- Han, K.¹ Luo, S.² Escorcia, O.³ Waldfried, C.⁴ Berry, I.⁵

9
- 38549135502
- DDBPE8 1012-0394, 10.4028/www.scientific.net/SSP.134.97
- K. Saga and T. Hattori, Solid State Phenom. DDBPE8 1012-0394, 134, 97 (2008). 10.4028/www.scientific.net/SSP.134.97
- (2008) Solid State Phenom. , vol.134 , pp. 97
- Saga, K.¹ Hattori, T.²

10
- 32844475671
- ECSTF8 1938-5862.
- K. Saga, H. Kuniyasu, and T. Hattori, ECS Trans. ECSTF8 1938-5862, 1 (3), 277 (2005).
- (2005) ECS Trans. , vol.1 , Issue.3 , pp. 277
- Saga, K.¹ Kuniyasu, H.² Hattori, T.³

11
- 74949138744
- DDBPE8 1012-0394, 10.4028/www.scientific.net/SSP.145-146.285
- M. Wada, K. Sano, J. Snow, R. Vos, L. H. A. Leunissen, P. W. Mertens, and A. Eitoki, Solid State Phenom. DDBPE8 1012-0394, 145-146, 285 (2009). 10.4028/www.scientific.net/SSP.145-146.285
- (2009) Solid State Phenom. , vol.145-146 , pp. 285
- Wada, M.¹ Sano, K.² Snow, J.³ Vos, R.⁴ Leunissen, L.H.A.⁵ Mertens, P.W.⁶ Eitoki, A.⁷

12
- 74949121241
- ECSTF8 1938-5862, 10.1149/1.3202651
- R. Vos, G. Mannaert, S. Halder, M. Wada, R. Sonnemans, D. Tsvetanova, N. Valckx, K. Vanstreels, T. Conard, and P. W. Mertens, ECS Trans. ECSTF8 1938-5862, 25 (5), 179 (2009). 10.1149/1.3202651
- (2009) ECS Trans. , vol.25 , Issue.5 , pp. 179
- Vos, R.¹ Mannaert, G.² Halder, S.³ Wada, M.⁴ Sonnemans, R.⁵ Tsvetanova, D.⁶ Valckx, N.⁷ Vanstreels, K.⁸ Conard, T.⁹ Mertens, P.W.¹⁰

13
- 78650749939
- 3rd Workshoon PESM 2010 , last accessed: 06/12/2010.
- D. Tsvetanova, R. Vos, M. Pohland, K. Vanstreels, G. Vereecke, A. Franquet, T. N. Parac-Vogt, P. W. Mertens, and M. M. Heyns, 3rd Workshop on PESM 2010 (https://imecevents.be/UserFiles/76/File/Presentations/S4/S4-Tsvetanova. pdf), last accessed: 06/12/2010.
- Tsvetanova, D.¹ Vos, R.² Pohland, M.³ Vanstreels, K.⁴ Vereecke, G.⁵ Franquet, A.⁶ Parac-Vogt, T.N.⁷ Mertens, P.W.⁸ Heyns, M.M.⁹

14
- 74949092302
- ECSTF8 1938-5862, 10.1149/1.3202652
- D. Tsvetanova, R. Vos, G. Vereecke, F. Clemente, K. Vanstreels, T. Conard, A. Franquet, T. N. Parac-Vogt, P. W. Mertens, and M. M. Heyns, ECS Trans. ECSTF8 1938-5862, 25 (5), 187 (2009). 10.1149/1.3202652
- (2009) ECS Trans. , vol.25 , Issue.5 , pp. 187
- Tsvetanova, D.¹ Vos, R.² Vereecke, G.³ Clemente, F.⁴ Vanstreels, K.⁵ Conard, T.⁶ Franquet, A.⁷ Parac-Vogt, T.N.⁸ Mertens, P.W.⁹ Heyns, M.M.¹⁰

15
- 0024620438
- NIMBEU 0168-583X, 10.1016/0168-583X(89)90902-6
- S. Fujimura and H. Yano, Nucl. Instrum. Methods Phys. Res. B NIMBEU 0168-583X, 39, 809 (1989). 10.1016/0168-583X(89)90902-6
- (1989) Nucl. Instrum. Methods Phys. Res. B , vol.39 , pp. 809
- Fujimura, S.¹ Yano, H.²

16
- 77955230235
- MIENEF 0167-9317, 10.1016/j.mee.2009.11.051
- E. Kesters, Q. T. Le, M. Lux, L. Prager, and G. Vereecke, Microelectron. Eng. MIENEF 0167-9317, 87, 1674 (2010). 10.1016/j.mee.2009.11.051
- (2010) Microelectron. Eng. , vol.87 , pp. 1674
- Kesters, E.¹ Le, Q.T.² Lux, M.³ Prager, L.⁴ Vereecke, G.⁵

17
- 78650739718
- JESOAN 0013-4651, To be submitted.
- D. Tsvetanova, R. Vos, G. Vereecke, F. Clemente, K. Vanstreels, D. Radisic, T. Conard, A. Franquet, T. N. Parac-Vogt, P. W. Mertens, J. Electrochem. Soc. JESOAN 0013-4651, To be submitted.
- J. Electrochem. Soc.
- Tsvetanova, D.¹ Vos, R.² Vereecke, G.³ Clemente, F.⁴ Vanstreels, K.⁵ Radisic, D.⁶ Conard, T.⁷ Franquet, A.⁸ Parac-Vogt, T.N.⁹ Mertens, P.W.¹⁰

18
- 0022189460
- PDSTDW 0141-3910, 10.1016/0141-3910(85)90084-9
- N. A. Weir, J. Arct, and M. Farahani, Polym. Degrad. Stab. PDSTDW 0141-3910, 13, 361 (1985). 10.1016/0141-3910(85)90084-9
- (1985) Polym. Degrad. Stab. , vol.13 , pp. 361
- Weir, N.A.¹ Arct, J.² Farahani, M.³

19
- 0033515971
- NIMBEU 0168-583X, 10.1016/S0168-583X(99)00092-0
- P. Cottin, R. A. Lessard, E. J. Knystautas, and S. Roorda, Nucl. Instrum. Methods Phys. Res. B NIMBEU 0168-583X, 151, 97 (1999). 10.1016/S0168-583X(99) 00092-0
- (1999) Nucl. Instrum. Methods Phys. Res. B , vol.151 , pp. 97
- Cottin, P.¹ Lessard, R.A.² Knystautas, E.J.³ Roorda, S.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.