Lossless solvent-based extension implant strip

ECS Transactions

Volumn 25, Issue 5, 2009, Pages 179-186

  Vos, R ^a   Mannaert, G ^a   Haider, S ^a   Wada, M ^b   Sonnemans, R ^c   Tsvetanova, D ^a   Valckx, N ^a   Vanstreels, K ^a   Conard, T ^a   Mertens, P W ^a  

^a IMEC   (Belgium)

^b DAINIPPON SCREEN MFG CO LTD   (Japan)

^c AXCELIS TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTOR DEVICES;

DOPED SUBSTRATES; HIGH-DOSE IMPLANTATION; NEW APPROACHES; OXIDIZING TREATMENT; PHYSICAL FORCE; POST TREATMENT; SHALLOW EXTENSION; SOLVENT BASED;

SUBSTRATES;

EID: 74949121241     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.3202651     Document Type: Conference Paper

References (9)

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