Review of atomic MEMS: Driving technologies and challenges

Microsystem Technologies

Volumn 16, Issue 10, 2010, Pages 1683-1689

  Dong, Haifeng ^a   Fang, Jiancheng ^a   Zhou, Binquan ^a   Qin, Jie ^a   Wan, Shuangai ^a  

^a BEIHANG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

LASER TECHNIQUE; MEMS TECHNOLOGY; MEMSDEVICES;

ATOMS;

EID: 78149407066     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-010-1089-6     Document Type: Review

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