메뉴 건너뛰기




Volumn 17, Issue 5, 2008, Pages 1270-1282

Fabrication and testing of a high-speed microscale turbocharger

Author keywords

Micro gas turbine; Micro heat engine; Micro power generation; Microturbocharger; PowerMEMS

Indexed keywords

AIRCRAFT PROPULSION; COMBUSTORS; COMPOSITE MICROMECHANICS; COMPRESSORS; ELECTRIC GENERATORS; ELECTROMECHANICAL DEVICES; ENGINES; FLUID MECHANICS; GAS ENGINES; GAS TURBINE POWER PLANTS; GAS TURBINES; HYDROSTATIC BEARINGS; JOURNAL BEARINGS; MEMS; MICROELECTROMECHANICAL DEVICES; SILICON; SPEED; SUPERCHARGERS; TEXTILE INDUSTRY; THRUST BEARINGS; TURBINES; TURBOGENERATORS;

EID: 53649111151     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2008.924257     Document Type: Article
Times cited : (24)

References (29)
  • 2
    • 33750687906 scopus 로고    scopus 로고
    • Modeling and experimental investigation of micro-hydrostatic gas thrust bearings for micro-turbomachines
    • Oct
    • C. J. Teo and Z. S. Spakovszky, "Modeling and experimental investigation of micro-hydrostatic gas thrust bearings for micro-turbomachines," Trans. ASME, J. Turbomach., vol. 128, no. 4, pp. 597-605, Oct. 2006.
    • (2006) Trans. ASME, J. Turbomach , vol.128 , Issue.4 , pp. 597-605
    • Teo, C.J.1    Spakovszky, Z.S.2
  • 3
  • 6
    • 10244266390 scopus 로고    scopus 로고
    • Aerothermodynamics of micro-turbomachinery
    • presented at the, Paper GT2004-53877
    • Y. Gong, B. T. Sirakov, A. H. Epstein, and C. S. Tan, "Aerothermodynamics of micro-turbomachinery," presented at the Proc. ASME Turbo Expo, vol. 6, pp. 95-102, 2004, Paper GT2004-53877.
    • (2004) Proc. ASME Turbo Expo , vol.6 , pp. 95-102
    • Gong, Y.1    Sirakov, B.T.2    Epstein, A.H.3    Tan, C.S.4
  • 7
    • 10244252770 scopus 로고    scopus 로고
    • Design and characterization of micro-compressor impellers
    • presented at the, Paper GT2004-53332
    • B. Sirakov, Y. Gong, A. H. Epstein, and C. S. Tan, "Design and characterization of micro-compressor impellers," presented at the Proc. ASME Turbo Expo, vol. 5A, pp. 737-746, 2004, Paper GT2004-53332.
    • (2004) Proc. ASME Turbo Expo , vol.5 A , pp. 737-746
    • Sirakov, B.1    Gong, Y.2    Epstein, A.H.3    Tan, C.S.4
  • 8
    • 20444484373 scopus 로고    scopus 로고
    • Development of a MEMS turbocharger and gas turbine engine,
    • Ph.D. dissertation, MIT, Cambridge, MA, Feb
    • N. Savoulides, "Development of a MEMS turbocharger and gas turbine engine," Ph.D. dissertation, MIT, Cambridge, MA, Feb. 2004.
    • (2004)
    • Savoulides, N.1
  • 9
    • 0005836482 scopus 로고    scopus 로고
    • An assessment of the aerodynamic, thermodynamic, and manufacturing issues for the design, development, and microfabrication of a demonstration micro engine,
    • Ph.D. dissertation, MIT, Cambridge, MA, Sep
    • J. M. Protz, "An assessment of the aerodynamic, thermodynamic, and manufacturing issues for the design, development, and microfabrication of a demonstration micro engine," Ph.D. dissertation, MIT, Cambridge, MA, Sep. 2000.
    • (2000)
    • Protz, J.M.1
  • 10
    • 34248387741 scopus 로고    scopus 로고
    • Catalytic combustion systems for micro-scale gas turbine engines
    • Jan
    • C. M. Spadaccini, J.-W. Peck, and I. A. Waitz, "Catalytic combustion systems for micro-scale gas turbine engines," Trans. ASME, J. Eng. Gas Turbines Power, vol. 129, no. 1, pp. 49-60, Jan. 2007.
    • (2007) Trans. ASME, J. Eng. Gas Turbines Power , vol.129 , Issue.1 , pp. 49-60
    • Spadaccini, C.M.1    Peck, J.-W.2    Waitz, I.A.3
  • 11
    • 33747215199 scopus 로고    scopus 로고
    • Microfabricated high-speed axial-flux multiwatt permanent-magnet generators - Part I: Modeling
    • Oct
    • S. Das, D. P. Arnold, I. Zana, J. W. Park, M. G. Allen, and J. H. Lang, "Microfabricated high-speed axial-flux multiwatt permanent-magnet generators - Part I: Modeling," J. Microelectromech. Syst., vol. 15, no. 5, pp. 1330-1350, Oct. 2006.
    • (2006) J. Microelectromech. Syst , vol.15 , Issue.5 , pp. 1330-1350
    • Das, S.1    Arnold, D.P.2    Zana, I.3    Park, J.W.4    Allen, M.G.5    Lang, J.H.6
  • 12
    • 33747208672 scopus 로고    scopus 로고
    • Microfabricated high-speed axial-flux multiwatt permanent-magnet Generators - Part II: Design, fabrication and testing
    • Oct
    • D. P. Arnold, S. Das, J. W. Park, I. Zana, J. H. Lang, and M. G. Allen, "Microfabricated high-speed axial-flux multiwatt permanent-magnet Generators - Part II: Design, fabrication and testing," J. Microelectromech. Syst., vol. 15, no. 5, pp. 1351-1363, Oct. 2006.
    • (2006) J. Microelectromech. Syst , vol.15 , Issue.5 , pp. 1351-1363
    • Arnold, D.P.1    Das, S.2    Park, J.W.3    Zana, I.4    Lang, J.H.5    Allen, M.G.6
  • 14
    • 0038054499 scopus 로고    scopus 로고
    • Enhancement of rotordynamic performance of high-speed micro-rotors for power MEMS applications by precision deep reactive ion etching
    • May
    • N. Miki, C. J. Teo, L. C. Ho, and X. Zhang, "Enhancement of rotordynamic performance of high-speed micro-rotors for power MEMS applications by precision deep reactive ion etching," Sens. Actuators A, Phys., vol. 104, no. 3, pp. 263-267, May 2003.
    • (2003) Sens. Actuators A, Phys , vol.104 , Issue.3 , pp. 263-267
    • Miki, N.1    Teo, C.J.2    Ho, L.C.3    Zhang, X.4
  • 15
    • 0037438778 scopus 로고    scopus 로고
    • Multi-stack silicon-direct wafer bonding for 3D MEMS manufacturing
    • Jan
    • N. Miki, X. Zhang, R. Khanna, A. A. Ayón, D. Ward, and S. M. Spearing, "Multi-stack silicon-direct wafer bonding for 3D MEMS manufacturing," Sens. Actuators A, Phys., vol. 103, no. 1/2, pp. 194-201, Jan. 2003.
    • (2003) Sens. Actuators A, Phys , vol.103 , Issue.1-2 , pp. 194-201
    • Miki, N.1    Zhang, X.2    Khanna, R.3    Ayón, A.A.4    Ward, D.5    Spearing, S.M.6
  • 16
    • 17144406379 scopus 로고    scopus 로고
    • Microfabrication of 3D silicon MEMS structures using gray-scale lithography and deep reactive ion etching
    • Mar
    • C. M. Waits, B. M. Morgan, M. J. Kastantin, and R. Ghodssi, "Microfabrication of 3D silicon MEMS structures using gray-scale lithography and deep reactive ion etching," Sens. Actuators A, Phys. vol. 119, no. 1, pp. 245-253, Mar. 2005.
    • (2005) Sens. Actuators A, Phys , vol.119 , Issue.1 , pp. 245-253
    • Waits, C.M.1    Morgan, B.M.2    Kastantin, M.J.3    Ghodssi, R.4
  • 17
    • 0346965529 scopus 로고    scopus 로고
    • Millimeter-scale, MEMS gas turbine engines
    • presented at the, Atlanta, GA, Jun, Paper GT-2003-38866
    • A. H. Epstein, "Millimeter-scale, MEMS gas turbine engines," presented at the Proc. ASME Turbo Expo, Atlanta, GA, Jun. 2003, Paper GT-2003-38866.
    • (2003) Proc. ASME Turbo Expo
    • Epstein, A.H.1
  • 18
    • 24144472493 scopus 로고    scopus 로고
    • Demonstration of a MEMS-based turbocharger on a single rotor
    • May
    • P. Kang, S. Tanaka, and M. Esashi, "Demonstration of a MEMS-based turbocharger on a single rotor," J. Micromech. Microeng., vol. 15, no. 5, pp. 1076-1087, May 2005.
    • (2005) J. Micromech. Microeng , vol.15 , Issue.5 , pp. 1076-1087
    • Kang, P.1    Tanaka, S.2    Esashi, M.3
  • 19
    • 33747321427 scopus 로고    scopus 로고
    • Experimental verification of the feasibility of a 100 W class micro-scale gas turbine at an impeller diameter of 10 mm
    • Sep
    • K. Isomura, M. Murayama, S. Teramoto, K. Hikichi, Y. Endo, S. Togo, and S. Tanaka, "Experimental verification of the feasibility of a 100 W class micro-scale gas turbine at an impeller diameter of 10 mm," J. Micromech. Microeng., vol. 16, no. 9, pp. S254-S261, Sep. 2006.
    • (2006) J. Micromech. Microeng , vol.16 , Issue.9
    • Isomura, K.1    Murayama, M.2    Teramoto, S.3    Hikichi, K.4    Endo, Y.5    Togo, S.6    Tanaka, S.7
  • 20
    • 2942657372 scopus 로고    scopus 로고
    • A microturbine for electric power generation
    • Jun
    • J. Peirs, D. Reynaerts, and F. Verplaetsen, "A microturbine for electric power generation," Sens. Actuators A, Phys., vol. 113, no. 1, pp. 86-93, Jun. 2004.
    • (2004) Sens. Actuators A, Phys , vol.113 , Issue.1 , pp. 86-93
    • Peirs, J.1    Reynaerts, D.2    Verplaetsen, F.3
  • 22
    • 53649088840 scopus 로고    scopus 로고
    • Miniature internal combustion engine (MICE) for portable electric power
    • presented at the, Orlando, FL, Dec. 2-5
    • K. D. Annen, D. B. Stickler, and J. Woodroffe, "Miniature internal combustion engine (MICE) for portable electric power," presented at the 23rd Army Science Conference, Orlando, FL, Dec. 2-5, 2002.
    • (2002) 23rd Army Science Conference
    • Annen, K.D.1    Stickler, D.B.2    Woodroffe, J.3
  • 24
    • 21244481531 scopus 로고    scopus 로고
    • MEMS rotary engine power system: Project overview and recent research results
    • D. C. Walther and A. P. Pisano, "MEMS rotary engine power system: Project overview and recent research results," in Proc. 4th Int. Symp. MEMS Nanotechnol., 2003, pp. 227-234.
    • (2003) Proc. 4th Int. Symp. MEMS Nanotechnol , pp. 227-234
    • Walther, D.C.1    Pisano, A.P.2
  • 25
    • 51649131437 scopus 로고    scopus 로고
    • Power production by a dynamic micro heat engine with an integrated thermal switch
    • Sep
    • J. H. Cho, L. W. Weiss, C. D. Richards, D. F. Bahr, and R. F. Richards, "Power production by a dynamic micro heat engine with an integrated thermal switch," J. Micromech. Microeng., vol. 17, no. 9, pp. S217-S223, Sep. 2007.
    • (2007) J. Micromech. Microeng , vol.17 , Issue.9
    • Cho, J.H.1    Weiss, L.W.2    Richards, C.D.3    Bahr, D.F.4    Richards, R.F.5
  • 26
    • 42149182367 scopus 로고    scopus 로고
    • Unsteady flow and dynamic behavior of ultra-short Lomakin gas bearings
    • Jan
    • C. J. Teo, Z. S. Spakovszky, and S. A. Jacobson, "Unsteady flow and dynamic behavior of ultra-short Lomakin gas bearings," Trans. ASME, J. Tribol., vol. 130, no. 1, pp. 1-9, Jan. 2008.
    • (2008) Trans. ASME, J. Tribol , vol.130 , Issue.1 , pp. 1-9
    • Teo, C.J.1    Spakovszky, Z.S.2    Jacobson, S.A.3
  • 27
    • 53649096889 scopus 로고    scopus 로고
    • Theory for hydrostatic gas journal bearings for MEMS,
    • Ph.D. dissertation, MIT, Cambridge, MA, Sep
    • L. Liu, "Theory for hydrostatic gas journal bearings for MEMS," Ph.D. dissertation, MIT, Cambridge, MA, Sep. 2005.
    • (2005)
    • Liu, L.1
  • 28
    • 33751278342 scopus 로고    scopus 로고
    • MEMS turbomachinery rotordynamics: Modeling, design and testing,
    • Ph.D. dissertation, MIT, Cambridge, MA, Jun
    • C. J. Teo, "MEMS turbomachinery rotordynamics: Modeling, design and testing," Ph.D. dissertation, MIT, Cambridge, MA, Jun. 2006.
    • (2006)
    • Teo, C.J.1
  • 29
    • 4344674034 scopus 로고    scopus 로고
    • Development of Si-SiC hybrid structures for elevated temperature micro-turbomachinery
    • Aug
    • H.-S. Moon, D. Choi, and S. M. Spearing, "Development of Si-SiC hybrid structures for elevated temperature micro-turbomachinery," J. Microelectromech. Syst., vol. 13, no. 4, pp. 676-687, Aug. 2004.
    • (2004) J. Microelectromech. Syst , vol.13 , Issue.4 , pp. 676-687
    • Moon, H.-S.1    Choi, D.2    Spearing, S.M.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.