Design and fabrication of GaInAsP/InP VCSEL with two a-Si/a-SiNx Bragg reflectors

Optical and Quantum Electronics

Volumn 38, Issue 4-6, 2006, Pages 281-291

  Levallois, C ^a   Corre, A L E ^a   Dehaese, O ^a   Folliot, H ^a   Paranthoen, C ^a   Labbe C ^a   Loualiche, S ^a  

^a UNIVERSITÉ DE RENNES 1   (France)

Author keywords

Amorphous semiconductors; Distributed Bragg reflectors; Sputter deposition; VCSEL; Wafer bonding

Indexed keywords

AMORPHOUS MATERIALS; ARSENIC; DESIGN; DIELECTRIC MATERIALS; FABRICATION; GALLIUM; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; SEMICONDUCTOR LASERS;

DISTRIBUTED BRAGG REFLECTORS; METALLIC BONDING PROCESS; SPECTRAL BANDWIDTH; SURFACE EMITTING LASERS;

SEMICONDUCTING SILICON;

EID: 33646558903     PISSN: 03068919     EISSN: 1572817X     Source Type: Journal    
DOI: 10.1007/s11082-006-0029-2     Document Type: Conference Paper

References (14)

1. Geske, J., K.G. Gan, Y.L. Okuno, J. Piprek and J.E. Bowers. IEEE J. Quantum. Electron. 40 1155, 2004.
2. Hubler, G.K., C.N. Waddell, W.G. Spitzer, J.E. Fredrickson, S. Prussin and R.G. Wilson. J. Appl. Phys. 50 3294, 1979.
3. Karim, A., J. Piprek, P. Abraham, D. Lofgreen, Y. Chiu and J.E. Bowers. IEEE J. Select. Topics Quantum Electron. 7 178, 2001.
4. Lee, C.C., C.Y. Wang and G. Matijasevic, IEEE Trans. Comp. Hybrids. Manuf. Technol. 16 311, 1993.
5. Levallois, C., A. Le Corre, S. Loualiche, O. Dehaese, H. Folliot, C. Paranthoen, F. Thoumyre and C. Labbé. J. Appl. Phys. 98 043107, 2005.
6. Lin, H.C., W.H. Wang, K.C. Hsiek and K.Y. Cheng. Electron. Lett. 38 516, 2002.
7. Nakagawa, S., E. Hall, G. Almuneau, J.K. Kim, D.A. Buell, H. Kroemer and L.A. Coldren. IEEE J. Quantum. Electron. 7 224, 2001.
8. Pendry, J.B. and A. MacKinnon. Phys. Rev. Lett. 69 2772, 1992.
9. Piprek, J, H. Wenzel, H.J. Wünsche, D. Braun and F. Henneberger. Proc. SPIE 2399 605, 1995.
10. Reddy, M.H.M., T. Asano, R. Koda, D.A. Buell and L.A. Coldren. IEEE Electron. Lett. 38 1181, 2002.
11. Richards, B.S., A. Lambertz and A.B. Sproul. Thin Solid Film 460 247, 2004.
12. Sun, D., W. Fan, P. Kner, J. Boucart, T. Kageyama, R. Pathak, D. Zhang and W. Yuen. IEEE Photon. Technol. Lett. 15 1677, 2003.
13. Syrbu, A., A. Mircea, A. Mereuta, A. Caliman, C.A. Berseth, G. Suruceanu, V. Iakovlev, M. Achtenhagen, A. Rudra and E. Kapon. IEEE Photon. Technol. Lett. 16 1230, 2004.
14. Waddell, C.N., W.G. Spitzer, J.E. Fredrickson, G.K. Hubler and T.A. Kennedy. J. Appl. Phys. 55 4361, 1984.