Rubidium vapor cell with integrated Bragg reflectors for compact atomic MEMS

Sensors and Actuators, A: Physical

Volumn 154, Issue 2, 2009, Pages 295-303

  Perez, Maximillian A ^a   Nguyen, Uyen ^b   Knappe, Svenja ^c   Donley, Elizabeth A ^c   Kitching, John ^c   Shkel, Andrei M ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Atomic MEMS; Bragg reflector; Gyroscope; Magnetometer; Optical MEMS; PECVD; Thin films; Vapor cells

Indexed keywords

ABSORPTION LINES; ATOMIC MEMS; BULK- MICROMACHINING; DIELECTRIC REFLECTORS; LASER LIGHTS; MEMS SENSORS; MICROMACHINED; OPTICAL EFFICIENCY; OPTICAL MEMS; OPTICAL POWER; PECVD; RUBIDIUM VAPOR CELL; THIN FILM REFLECTORS; VAPOR CELLS;

ABSORPTION; ATOMS; BRAGG REFLECTORS; CELL MEMBRANES; FILM PREPARATION; GYROSCOPES; LIGHT TRANSMISSION; MAGNETOMETERS; MEMS; MICROELECTROMECHANICAL DEVICES; OPTICAL MULTILAYERS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RUBIDIUM; THIN FILM DEVICES; THIN FILMS; VAPORS;

REFLECTION;

EID: 69549133512     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2009.06.001     Document Type: Article

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