Spherical rubidium vapor cells fabricated by micro glass blowing

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 171-174

  Eklund, E Jesper ^a   Shkel, Andrei M ^a   Knappe, Svenja ^b   Donley, Elizabeth ^b   Kitching, John ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; GLASS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; NONMETALS; OPTICAL DESIGN; REACTIVE ION ETCHING; RUBIDIUM; SILICON; SILICON WAFERS; THREE DIMENSIONAL; VAPORS; WAFER BONDING;

ALKALI-VAPOR CELLS; ANODIC BONDING; BONDED WAFERS; FABRICATION PROCESSES; GLASS BLOWING; GLASS SPHERES; GLASS WAFERS; INTERNATIONAL CONFERENCES; MICRO-ELECTRO MECHANICAL SYSTEMS; RUBIDIUM VAPOR; SOFTENING POINTS; SPHERICAL CELLS; TRAPPED GASES;

GLASS BONDING;

EID: 40949155064     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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