Glass blowing on a wafer level

Journal of Microelectromechanical Systems

Volumn 16, Issue 2, 2007, Pages 232-239

  Eklund, E Jesper ^a   Shkel, Andrei M ^a  

^a University of California at Irvine   (United States)

Author keywords

Fabrication; Glass; Glass blowing; Glass bubble; Glass shell; Microglass sphere; Micromachining; Spheres; Wafer level manufacturing

Indexed keywords

COMPUTER SIMULATION; ETCHING; FABRICATION; GLASS BONDING; MICROMACHINING; SPHERES; WAFER BONDING;

GLASS BLOWING; GLASS BUBBLE; GLASS SHELL; WAFER LEVEL;

SILICON WAFERS;

EID: 34147192133     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.892887     Document Type: Article

References (22)

1. A. MacFarlane and G. Martin, Glass: A World History. Chicago, IL: University of Chicago Press, 2002.
2. E. J. Eklund and A. M. Shkel, Wafer-Level Micro-Glass-Blowing UCI Office of Technology Alliances, UC Case No, 2006-176, 2005.
3. E. J. Eklund and A. M. Shkel, Glass Blowing on a Wafer Scale (Expanded Version of 2006-176) UC Case No. 2006-519, 2006.
4. K. F. Woodman, P. W. Franks, and M. D. Richards, "The nuclear magnetic resonance gyroscope: A review," J. Navigation, vol. 40, no. 3, pp. 366-384, 1987.
5. P. Härle, G. Wäckerle, and M. Mehring, "A nuclear-spin based rotation sensor using optical polarization and detection methods," Appl. Magn. Reson., vol. 5, no. 2, pp. 207-220, 1993.
6. T. W. Kornack, R. K. Ghosh, and M. V. Romalis, "Nuclear spin gyroscope based on an atomic comagnetometer," Phys. Rev. Lett., vol. 95, no. 23, p. 230801, 2005.
7. J. E. Shelby, Introduction to Glass Science and Technology.: The Royal Society of Chemistry, 1997.
8. Corning, 2006, Thermal Properties of Corning Glasses [Online]. Available: http://www.corning.com/lifesciences/technical_information/ techdocs/thermalprop.asp
9. M. A. Huff, A. D. Nikolich, and M. A. Schmidt, "Design of sealed cavity microstructures formed by silicon wafer bonding," J. Microelectromech. Syst., vol. 2, no. 2, pp. 74-81, 1993.
10. C. D. Denson and R. J. Gallo, "Measurements on the biaxial extension viscosity of bulk polymers: The inflation of a thin polymer sheet," Polym. Eng. Sci., vol. 11, no. 2, pp. 174-176, 1971.
11. D. D. Joye, G. W. Poehlein, and C. D. Denson, "A bubble inflation technique for the measurement of viscoelastic properties in equal biaxial extensional flow," T. Soc. Rheol., vol. 16, no. 3, pp. 421-445, 1972.
12. A. S. Wineman, "Large axisymmetric inflation of a nonlinear viscoelastic membrane by lateral pressure," T. Soc. Rheol., vol. 20, no. 2, pp. 203-225, 1976.
13. C. J. S. Petrie, Elongational Flows. New York: Pitman, 1979.
14. J. Rhi-Sausi and J. M. Dealy, "A biaxial extensiometer for molten plastics," Polym. Eng. Sci., vol. 21, no. 4, pp. 227-232, 1981.
15. R. H. Doremus, Glass Science. New York: Wiley, 1973.
16. A. C. Ugural, Stresses in Plates and Shells. New York: McGraw-Hill, 1981.
17. O. Hassager, S. B. Kristensen, J. R. Larsen, and J. Neergaard, "Inflation and instability of a polymeric membrane," J. Non-Newtonian Fluid Mech., vol. 88, no. 2, pp. 185-204, 1999.
18. R. B. Bird, W. E. Stewart, and E. N. Lightfoot, Transport Phenomena 2nd ed. New York: Wiley, 2001.
19. J. M. Dealy, "Official nomenclature for material functions describing the response of a viscoelastic fluid to various shearing and extensional deformations," J. Rheol., vol. 39, no. 1, pp. 253-265, 1995.
20. A. H. Bloksma, "A calculation of the shape of the alveograms of some rheological model substances," Cereal Chem., vol. 34, pp. 126-136, 1957.
21. D. Malacara and Z. Malacara, Handbook of Optical Design, 2nd ed. New York: Marcel Dekker, 2004.
22. D. Budker, L. Hollberg, D. F. Kimball, J. Kitching, S. Pustelny, and V. V. Yashchuk, "Microwave transitions and nonlinear magneto-optical rotation in anti-relaxation-coated cells," Phys. Rev. A, vol. 71, no. 1, p. 012903, 2005.