Some considerations of effects-induced errors in resonant cantilevers with the laser deflection method

Journal of Micromechanics and Microengineering

Volumn 20, Issue 10, 2010, Pages

  Sadeghian, Hamed ^a,b   Yang, Chung Kai ^b   Gavan, Khashayar Babaei ^c   Goosen, Johannes F L ^b   Van Emile Der Drift, W J M ^c   Van Der Zant, Herre S J ^c   Bossche, Andre ^b   French, Paddy J ^b   Van Keulen, Fred ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^c DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ACTION EFFECT; LASER DEFLECTION; LASER DEFLECTION METHOD; RESONANCE FREQUENCIES; RESONANT CANTILEVER; RESONANT RESPONSE; SENSING APPLICATIONS; SILICON CANTILEVER; SURFACE CONTAMINATIONS; SURFACE EFFECT; ULTRA-HIGH-SENSITIVITY; WATER ADSORPTION;

ERRORS; FIBER OPTIC SENSORS; GAS ADSORPTION; RESONANCE;

NANOCANTILEVERS;

EID: 78049397775     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/10/105027     Document Type: Article

References (37)

1. Varshney M, Waggoner P S, Tan C P, Aubin K, Montagna R A and Craighead H G 2008 Prion protein detection using nanomechanical resonator arrays and secondary mass labeling Anal. Chem. 80 2141-8
2. Mamin H J and Rugar D 2001 Sub-attonewton force detection at millikelvin temperatures Appl. Phys. Lett. 79 3358-60
3. Naik A, Buu O, LaHaye M D, Armour A D, Clerk A A, Blencowe M P and Schwab K C 2006 Cooling a nanomechanical resonator with quantum back-action Nature 443 193-6
4. Gupta A, Akin D and Bashir R 2004 Single virus particle mass detection using microresonators with nanoscale thickness Appl. Phys. Lett. 84 1976-8
5. 2 piezoelectric microcantilevers with femtogram/hertz sensitivity Appl. Phys. Lett. 89 023506
6. Yang Y, Callegari C, Feng X, Ekinci K and Roukes M 2006 Zeptogram-scale nanomechanical mass sensing Nano Lett. 6 583-6
7. Sadeghian H, Goosen H, Bossche A and van Keulen F 2010 Application of electrostatic pull-in instability on sensing adsorbate stiffness in nanomechanical resonators Thin Solid Films 518 5018-21
8. King W H 1964 Piezoelectric sorption detector Anal. Chem. 36 1735-9
9. Mecea V M 1994 Loaded vibrating quartz sensors Sensors Actuators A 40 1-27
10. Kim C-J, Kim J Y and Sridharan B 1998 Comparative evaluation of drying techniques for surface micromachining Sensors Actuators A 64 17-26
11. Ramos D, Arroyo-Hernalndez M, Gil-Santos E, Tong H D, Van Rijn C, Calleja M and Tamayo J 2009 Arrays of dual nanomechanical resonators for selective biological detection Anal. Chem. 81 2274-9
12. Ekinci K 2005 Electromechanical transducers at the nanoscale: actuation and sensing of motion in nanoelectromechanical systems (NEMS) Small 1 786-97
13. Lavrik N, Sepaniak M J and Datskos P G 2004 Cantilever transducers as a platform for chemical and biological sensors Rev. Sci. Instrum. 75 2229-53
14. Bell D J, Lu T J, Fleck N A and Spearing S M 2005 MEMS actuators and sensors: observations on their performance and selection for purpose J. Micromech. Microeng. 15 S153
15. Meyer G and Amer N M 1988 Novel optical approach to atomic force microscopy Appl. Phys. Lett. 53 1045-7
16. Meyer G and Amer N M 1988 Novel optical approach to atomic force microscopy Appl. Phys. Lett. 53 2400-2 (erratum)
17. Hie B, Craighead H G, Krylov S, Senaratne W, Ober C and Neuzil P 2004 Attogram detection using nanoelectromechanical oscillators J. Appl. Phys. 95 3694-703
18. Sone H, Fujinuma Y and Hosaka S 2004 Picogram mass sensor using resonance frequency shift of cantilever Japan. J. Appl. Phys. 43 3648-51
19. Gysin U, Rast S, Ruff P, Meyer E, Lee D W, Vettiger P and Gerber C 2004 Temperature dependence of the force sensitivity of silicon cantilevers Phys. Rev. B 69 045403
20. Wu G, Ji H, Hansen K, Thundat T, Datar R, Cote R, Hagan M F, Chakraborty A K and Majumdar A 2001 Origin of nanomechanical cantilever motion generated from biomolecular interactions Proc. Natl Acad. Sci. USA 98 1560-4
21. Braun T, Ghatkesar M K, Backmann N, Grange W, Boulanger P, Letellier L, Lang H-P, Bietsch A, Gerber C and Hegner M 2009 Quantitative time-resolved measurement of membrane protein-ligand interactions using microcantilever array sensors Nat. Nano 4179-85
22. Evans D R and Craig V S J 2006 Sensing cantilever beam bending by the optical lever technique and its application to surface stress J. Phys. Chem. B 110 5450-61
23. Ilic B, Czaplewski D, Zalalutdinov M, Craighead H G, Neužil P, Campagnolo C and Batt C 2001 Single cell detection with micromechanical oscillators J. Vac. Sci. Technol. B 19 2825-8
24. Duan H, Xue Y and Yi X 2009 Vibration of cantilevers with rough surfaces Acta Mech. Solida Sin. 22 550-4
25. Weissmüller J and Duan H 2008 Cantilever bending with rough surfaces Phys. Rev. Lett. 101 146102
26. Babaei Gavan K, van der Drift E W J M, Venstra W J, Zuiddam M R and van der Zant H S J 2009 Effect of undercut on the resonant behavior of silicon nitride cantilevers J. Micromech. Microeng. 19 1-8
27. Sone H, Okano H and Hosaka S 2004 Picogram mass sensor using piezoresistive cantilever for biosensor Japan. J. Appl. Phys. 43 4663-6
28. Lassagne B, Garcia-Sanchez D, Aguasca A and Bachtold A 2008 Ultrasensitive mass sensing with a nanotube electromechanical, resonator Nano Lett. 8 3735-8
29. Sadeghian H, Yang C K, Babaei Gavan K, Goosen J F L, van der Drift E W J M, van der Zant H S J, French P J, Bossche A and van Keulen F 2009 Effects of surface stress on nanocantilevers e-J. Surface Sci. Nanotechnol, 7 161-6
30. Sone H, Ikeuchi A, Izumi T, Okano H and Hosaka S 2006 Femtogram mass biosensor using self-sensing cantilever for allergy check Japan. J. Appl, Phys. 45 2301-4
31. Ramos D, Arroyo-Hernalndez M, Gil-Santos E, Tong H Duy, Van Rijn C, Calleja M and Tamayo J 2009 Arrays of dual nanomechanical resonators for selective biological detection Anal. Chem. 81 2274-9
32. Gordon M J, Baron T, Dhalluin F, Gentile P and Ferret P 2009 Size effects in mechanical deformation and fracture of cantilevered silicon nanowires Nano Lett. 9 525-9
33. Kazinczi R 2002 Reliability of micromechanical thin-film resonators PhD Thesis Delft University of Technology
34. Renata M, Bongsang K, Saurabh A C, Matthew A H, Manu A, Chandra M J and Thomas W K 2007 Temperature-compensated high-stability silicon resonators Appl. Phys. Lett. 90 244107
35. Jianqiang H, Changchun Z, Junhua L and Yongning H 2002 Dependence of the resonance frequency of thermally excited microcantilever resonators on temperature Sensors Actuators A 101 37-41
36. Sadeghian H, Yang C-K, Goosen H, Bossche A, French P and van Keulen F 2010 Temperature sensitivity of silicon cantilevers' elasticity with the electrostatic pull-in instability Sensors Actuators A 162 220-4
37. McSkimin H J 1953 Measurement of elastic constants at low temperatures by means of ultrasonic waves-data for silicon and germanium single crystals, and for fused silica J. Appl. Phys. 24 988-97