Vibration of cantilevers with rough surfaces

Acta Mechanica Solida Sinica

Volumn 22, Issue 6, 2009, Pages 550-554

  Duan, Huiling ^a   Xue, Yahui ^a   Yi, Xin ^a,b  

^a Peking University   (China)

^b Brown University   (United States)

Author keywords

micro cantilevers; resonance frequency; surface roughness; surface stress

Indexed keywords

COATING FILMS; MICRO-CANTILEVERS; RESONANCE FREQUENCIES; RESONANCE FREQUENCY; ROUGH SURFACES; SURFACE INCLINATION ANGLE; SURFACE STRESS;

ATOMIC FORCE MICROSCOPY; METAL ANALYSIS; NANOCANTILEVERS; NATURAL FREQUENCIES; PHOTORESISTS; POISSON RATIO; SURFACE ROUGHNESS;

SURFACE PROPERTIES;

EID: 73349097568     PISSN: 08949166     EISSN: 18602134     Source Type: Journal    
DOI: 10.1016/S0894-9166(09)60385-2     Document Type: Article

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