Temperature sensitivity of silicon cantilevers' elasticity with the electrostatic pull-in instability

Sensors and Actuators, A: Physical

Volumn 162, Issue 2, 2010, Pages 220-224

  Sadeghian, Hamed ^a,b   Yang, Chung Kai ^a   Goosen, Hans ^b   Bossche, Andre ^a   French, Paddy ^a   Van Keulen, Fred ^b  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Cantilever; Nanoelectromechanical systems; Pull in instability; Single crystal silicon; Temperature sensitivity; Young's modulus

Indexed keywords

CANTILEVER; NANOELECTROMECHANICAL SYSTEMS; PULL-IN INSTABILITY; SINGLE CRYSTAL SILICON; TEMPERATURE SENSITIVITY; YOUNG'S MODULUS;

ATOMIC FORCE MICROSCOPY; ELASTIC MODULI; ELASTICITY; ELECTROSTATICS; NEMS; SILICON WAFERS; SINGLE CRYSTALS; STABILITY;

NANOCANTILEVERS;

EID: 77957159328     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2010.01.012     Document Type: Conference Paper

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