Influencing factors on microtribology of DLC films for MEMS and microactuators

Diamond and Related Materials

Volumn 13, Issue 4-8, 2004, Pages 1491-1493

  Bandorf, R ^a   Luthje H ^a   Staedler, T ^a  

^a Fraunhofer Inst Surf Eng/Thin F   (Germany)

Author keywords

Diamond like carbon; Micro electromechanical systems; Tribology

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELASTIC MODULI; FRICTION; HARDNESS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; SURFACE ROUGHNESS; THIN FILMS;

DIAMON-LIKE CARBON (DLC) FILMS; MICROTRIBOLOGY; PIN-ON-DISK TESTS;

DIAMOND FILMS;

DIAMOND-LIKE CARBON; FRICTION; HARDNESS; MECHANICAL PROPERTY; TESTING; TRIBOLOGY;

EID: 2442543207     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2004.01.032     Document Type: Article

References (6)

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5. Staedler T. Schiffmann K. Adv. Eng. Mat. 3 3 2001 333
6. Timoshenko S. Woinowsky-Krieger S. Theory of Plates and Shells 2nd Edn 1959 McGraw-Hill Book Company New York