Fabrication of a micromachined magnetic X/Y/Z scanner for parallel scanning probe applications

Microelectronic Engineering

Volumn 53, Issue 1, 2000, Pages 509-512

  Rothuizen, H ^a   Drechsler, U ^a   Genolet, G ^a   Haberle W ^a   Lutwyche, M ^a   Stutz, R ^a   Widmer, R ^a   Vettiger, P ^a  

^a IBM RESEARCH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; COPPER; ELECTROPLATING; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NATURAL FREQUENCIES; OPTICAL MICROSCOPY; PERMANENT MAGNETS; SILICON;

MAGNETICALLY ACTUATED MICROMECHANICAL SCANNER; PARALLEL SCANNING PROBE TECHNIQUES;

MICROELECTRONIC PROCESSING;

EID: 0034207250     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(00)00366-X     Document Type: Article

References (5)

1. 1. S. Minne et al., Appl. Phys. Lett. 72, 2340 (1998).
2. 2. M. Lutwyche et al., Sensors and Actuators A 73, 89 (1999).
3. 3. Patent SZ994009, US patent US5808302.
4. 4. M. Lutwyche et al., Proc. 194th Meeting of the Electrochemical Society, Boston, 1998.
5. 5. M. Despont et al., Proc. MEMS '97 (IEEE, Piscataway, NJ, 1997), pp. 518-522.