Diffraction grating scanners using polysilicon micromotors

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 5, Issue 1, 1999, Pages 75-82

  Azzam Yasseen, A ^a   Smith, Steven W ^a   Merat, Francis L ^a   Mehregany, Mehran ^a  

^a Case Western Reserve University   (United States)

Author keywords

Chemical mechanical polishing; Microactuators; Micromotors; MOEMS; Scanners

Indexed keywords

CHEMICAL POLISHING; DIFFRACTION GRATINGS; ELECTRIC MOTORS; MICROACTUATORS; MONOLAYERS; POLYCRYSTALLINE MATERIALS; ROTORS (WINDINGS); SILICON; SURFACE ROUGHNESS;

CHEMICAL MECHANICAL POLISHING (CMP); MICROMOTORS; SELF-ASSEMBLED MONOLAYERS (SAM);

SCANNING;

EID: 0032675845     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/2944.748108     Document Type: Article

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