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Volumn 5, Issue 1, 1999, Pages 75-82

Diffraction grating scanners using polysilicon micromotors

Author keywords

Chemical mechanical polishing; Microactuators; Micromotors; MOEMS; Scanners

Indexed keywords

CHEMICAL POLISHING; DIFFRACTION GRATINGS; ELECTRIC MOTORS; MICROACTUATORS; MONOLAYERS; POLYCRYSTALLINE MATERIALS; ROTORS (WINDINGS); SILICON; SURFACE ROUGHNESS;

EID: 0032675845     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/2944.748108     Document Type: Article
Times cited : (24)

References (15)
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    • Slogaard, O.1    Sandejas, F.S.A.2    Bloom, D.M.3
  • 9
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    • Chemical mechanical polishing for polysilicon surface micromachining
    • Jan.
    • A. A. Yasseen, N. J. Mourlas, and M. Mehregany, "Chemical mechanical polishing for polysilicon surface micromachining," J. Electrochem. Soc., vol. 144, no. 1, pp. 237-242, Jan. 1997.
    • (1997) J. Electrochem. Soc. , vol.144 , Issue.1 , pp. 237-242
    • Yasseen, A.A.1    Mourlas, N.J.2    Mehregany, M.3
  • 10
    • 0029202106 scopus 로고
    • Performance impact of monolayer coating of polysilicon micromotors
    • Amsterdam, The Netherlands, Feb.
    • K. Deng, R. Collins, M. Mehregany, and C. Sukenik, "Performance impact of monolayer coating of polysilicon micromotors," in Proc. IEEE Micro Electro Mechanical Systems, Amsterdam, The Netherlands, Feb. 1995. pp. 368-373.
    • (1995) Proc. IEEE Micro Electro Mechanical Systems , pp. 368-373
    • Deng, K.1    Collins, R.2    Mehregany, M.3    Sukenik, C.4
  • 12
    • 0029752062 scopus 로고    scopus 로고
    • Surface-micromachined electrostatic-comb driven scanning micromirrors for barcode scanners
    • San Diego, CA, Feb.
    • M. H Kiang, O. Solgaard, R. S. Muller, and K. Y. Lau, "Surface-micromachined electrostatic-comb driven scanning micromirrors for barcode scanners," in Proc. IEEE Micro Electro Mechanical Systems, San Diego, CA, Feb. 1996, pp. 192-197.
    • (1996) Proc. IEEE Micro Electro Mechanical Systems , pp. 192-197
    • Kiang, M.H.1    Solgaard, O.2    Muller, R.S.3    Lau, K.Y.4
  • 13
    • 0031704724 scopus 로고    scopus 로고
    • Application of Sol-Gel deposited thin PZT film for actuation of ID and 2D scanners
    • Heidelberg, Germany, Feb.
    • A. Scroth, C. Lee, S. Matsumoto, M. Tanaka, and R. Maeda, "Application of Sol-Gel deposited thin PZT film for actuation of ID and 2D scanners," in Proc. IEEE Micro Electro Mechanical Systems, Heidelberg, Germany, Feb. 1998, pp. 402-707.
    • (1998) Proc. IEEE Micro Electro Mechanical Systems , pp. 402-707
    • Scroth, A.1    Lee, C.2    Matsumoto, S.3    Tanaka, M.4    Maeda, R.5
  • 14
    • 0005503824 scopus 로고    scopus 로고
    • Linear array of complementary metal oxide semiconductor double-pass metal micromirrors
    • May
    • J. Bhuler, F. Steiner, R. Hauert, and H. Baltes, "Linear array of complementary metal oxide semiconductor double-pass metal micromirrors," Opt. Eng., vol. 36, no. 5, pp. 1391-1398, May 1997.
    • (1997) Opt. Eng. , vol.36 , Issue.5 , pp. 1391-1398
    • Bhuler, J.1    Steiner, F.2    Hauert, R.3    Baltes, H.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.