Micro-machined XY stage for fiber optics module alignment

Conference on Optical Fiber Communication, Technical Digest Series

Volumn 4, Issue , 2005, Pages 131-133

  Epitaux, Marc ^a   Verdeil, Jean Marc ^a   Pétremand, Yves ^b   Noell, Wilifried ^b   De Rooij, Nicoolas F ^b  

^a INTEL CORPORATION   (United States)

^b UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

FIBER OPTICS; MICROLENSES; MICROPROCESSOR CHIPS; OPTICAL DEVICES; SILICON;

FIBER OPTICS MODULE ALIGNMENT; MEMS MICRO-ALIGNMENT METHOD; SILICON CHIP DESIGN;

MICROMACHINING;

EID: 33745253779     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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