A high fill-factor comb-driven XY-stage with topological layer switch architecture

IEICE Electronics Express

Volumn 3, Issue 9, 2006, Pages 197-202

  Takahashi, Kazuhiro ^a,b   Mita, Makoto ^c   Fujita, Hiroyuki ^a   Toshiyoshi, Hiroshi ^a,b  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^b KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY   (Japan)

^c JAPAN AEROSPACE EXPLORATION AGENCY   (Japan)

Author keywords

Comb drive; Double gimbal XY stage; Electrostatic micro actuator; MEMS; Topological layer switch architecture

Indexed keywords

EID: 33947400206     PISSN: None     EISSN: 13492543     Source Type: Journal    
DOI: 10.1587/elex.3.197     Document Type: Article

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