Towards integration of glass microlens with silicon comb-drive X-Y microstage

2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS

Volumn , Issue , 2008, Pages 168-169

  Laszczyk, Karolina ^a   Bargiel, Sylwester ^a   Gorecki, Christophe ^a   Krȩzel, Jerzy ^b  

^a UNIVERSITÉ DE FRANCHE COMTÉ   (France)

^b WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; GLASS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROLENSES; PHOTONICS; SILICON;

MICROLENS; MICROSTAGE; NEW CONCEPTS; ON-CHIP; OPTICAL;

OPTICAL GLASS;

EID: 54049132974     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2008.4607882     Document Type: Conference Paper

References (3)

1. H.N. Kwon, J-H. Lee, K. Takahashi, H. Toshiyoshi, Micro XY stages with spider-leg actuators for two-dimensional optical scanning, Sensors and Actuators A 130-131 (2006), 468-477.
2. A. Jain, H. Xie, A Tunable microlens scanner with Large-Vertical- Displacement Actuation, Photonics Technology Letters, IEEE,Volume 17, Issue 9, (2005), 1971-1973.
3. S. Bargiel, R. Walczak, J. S. Albero, J. Dziuban, K. Alkowska, Ł. Nieradko, M. Józwik, Ch. Gorecki, Towards the miniaturisation of optical microscopes, XX Eurosensors, Göteborg, Sweden, 17-20 September 2006.