Piezoresistive microcantilevers from ultrananocrystalline diamond

Journal of Microelectromechanical Systems

Volumn 19, Issue 5, 2010, Pages 1234-1242

  Privorotskaya, Natalya L ^a   Zeng, Hongjun ^b   Carlisle, John A ^b   Bashir, Rashid ^c   King, William P ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b ADVANCED DIAMOND TECHNOLOGIES INC   (United States)

^c United States of America   (United States)

Author keywords

Diamond; microcantilever; piezoresistivity

Indexed keywords

BORON-DOPED; ELECTRICAL RESISTANCES; ELECTRICAL RESISTIVITY; GAUGE FACTORS; MICRO-CANTILEVERS; ORDERS OF MAGNITUDE; PIEZO-RESISTIVE; PIEZORESISTIVE COEFFICIENTS; PIEZORESISTIVE EFFECTS; PIEZORESISTIVE PROPERTIES; PIEZORESISTIVITY; ROOM TEMPERATURE; TEMPERATURE COEFFICIENT; TEMPERATURE DEPENDENT; TEMPERATURE RANGE; ULTRA-NANOCRYSTALLINE DIAMOND;

ATOMIC FORCE MICROSCOPY; BORON; CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; ELECTRIC CONDUCTIVITY;

DIAMONDS;

EID: 77957570116     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2067201     Document Type: Article

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