Picoliter solution deposition for total reflection X-ray fluorescence analysis of semiconductor samples

Spectrochimica Acta - Part B Atomic Spectroscopy

Volumn 65, Issue 9-10, 2010, Pages 805-811

  Sparks, Chris M ^a   Fittschen, Ursula E A ^b,c   Havrilla, George J ^b  

^a SVTC Technologies   (United States)

^b LOS ALAMOS NATIONAL LABORATORY   (United States)

^c UNIVERSITY OF HAMBURG   (Germany)

Author keywords

Picoliter deposition; Total reflection X ray fluorescence; TXRF; Vapor phase decomposition; VPD

Indexed keywords

PICOLITER DEPOSITION; TOTAL REFLECTION X-RAY FLUORESCENCE; TXRF; VAPOR PHASE DECOMPOSITION; VPD;

ELECTROMAGNETIC WAVE REFLECTION; FLUORESCENCE; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; TRACE ELEMENTS; VAPORS; X RAYS;

DEPOSITION;

EID: 77957229003     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sab.2010.07.003     Document Type: Article

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