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Volumn 19, Issue 12, 2004, Pages 1517-1523

Saturation effects in TXRF on micro-droplet residue samples

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION; FLUORESCENCE; FUNCTIONS; PARAMETER ESTIMATION; SAMPLING; THIN FILMS;

EID: 10944239573     PISSN: 02679477     EISSN: None     Source Type: Journal    
DOI: 10.1039/b410643a     Document Type: Article
Times cited : (45)

References (29)
  • 9
    • 10944237561 scopus 로고    scopus 로고
    • See: The International Technology Roadmap for Semiconductors, Semiconductor Industry Association: Metrology, 2003, pp. 4-5, see also http://public.itrs.net/ for the most recent updates.
    • (2003) , pp. 4-5
  • 18
    • 10944264164 scopus 로고    scopus 로고
    • presented at the European VPD-DC Workshop, Nijmegen, The Netherlands, May
    • E. Bouwman, Impact of Drying Methods on Ni spots, presented at the European VPD-DC Workshop, Nijmegen, The Netherlands, May, 1997.
    • (1997) Impact of Drying Methods on Ni Spots
    • Bouwman, E.1
  • 23
    • 0000592240 scopus 로고    scopus 로고
    • eds. H. R. Huff, H. Tsuya and U. Gosele, Proceedings Electrochemical Society, Pennington, NJ
    • S. Pahlke, L. Kotz, T. Ehmann, P. Eichinger and A. Huber, in Silicon Materials, Science and Technology, eds. H. R. Huff, H. Tsuya and U. Gosele, Proceedings Vol. 98-1, Electrochemical Society, Pennington, NJ, 1998, pp. 1524-1540.
    • (1998) Silicon Materials, Science and Technology , vol.98 , Issue.1 , pp. 1524-1540
    • Pahlke, S.1    Kotz, L.2    Ehmann, T.3    Eichinger, P.4    Huber, A.5
  • 25
    • 10944262997 scopus 로고    scopus 로고
    • NIST database: http://physics.nist.gov/PhysRef Data/XrayMass-Coef, 2004.
    • (2004) NIST Database
  • 28
    • 10944234292 scopus 로고    scopus 로고
    • eds. C. H. Mastrangelo and H. Becker, SPIE, Bellingham, WA, USA
    • P. Cooley, D. Wallace and B. Antohe in Microfluidics and BioMEMS, eds. C. H. Mastrangelo and H. Becker, SPIE, Bellingham, WA, USA, vol. 4560, pp. 177-188.
    • Microfluidics and BioMEMS , vol.4560 , pp. 177-188
    • Cooley, P.1    Wallace, D.2    Antohe, B.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.