Hydrogenated amorphous silicon based surface passivation of c-Si at high deposition temperature and rate

Physica Status Solidi - Rapid Research Letters

Volumn 4, Issue 8-9, 2010, Pages 206-208

  Illiberi, A ^a   Creatore, M ^a   Kessels, W M M ^a   van de Sanden, M C M ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Charge carrier recombination; Hydrogenated amorphous silicon; Si; Solar cells; Surface passivation

Indexed keywords

A-SI:H; CHARGE CARRIER RECOMBINATION; DEPOSITION METHODS; HIGH DEPOSITION TEMPERATURE; HYDROGENATED AMORPHOUS SILICON; LOW SUBSTRATE TEMPERATURE; POST-DEPOSITION; SI; SI WAFER; SURFACE PASSIVATION; THERMAL TREATMENT;

CHARGE CARRIERS; DEPOSITION; HYDROGENATION; PASSIVATION; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; SOLAR CELLS;

AMORPHOUS SILICON;

EID: 77957055206     PISSN: 18626254     EISSN: 18626270     Source Type: Journal    
DOI: 10.1002/pssr.201004234     Document Type: Article

References (28)

1. A. G. Aberle, Prog. Photovolt., Res. Appl. 8, 473 (2000).
2. Y. Tsunomura, Y. Yoshimine, M. Taguchi et al., Sol. Energy Mater. Sol. Cells 93, 670 (2009).
3. M. Hofmann, S. Janz, C. Schmidt et al., Sol. Energy Mater. Sol. Cells 93, 1074 (2009).
4. H. Fujiwara and M. Kondo, Appl. Phys. Lett. 90, 013503 (2007).
5. S. De Wolf and M. Kondo, Appl. Phys. Lett. 90, 042111 (2007).
6. J. J. H. Gielis, B. Hoex, P. J. van den Oever, M. C. M. van de Sanden, and W. M. M. Kessels, Thin Solid Films 517, 3456 (2009).
7. J. Thiesen, E. Iwaniczko, K. M. Jones, A. Mahan, and R. Crandall, Appl. Phys. Lett. 75, 992 (1999).
8. T. H. Wang, E. Iwaniczko, M. R. Page, D. H. Deli et al., Thin Solid Films 501, 284 (2006).
9. S. De Wolf, S. Olibert, and C. Ballif, Appl. Phys. Lett. 93, 032101 (2008).
10. J. Damon, L. Fesquet, S. Olibert, and C. Balif, Thin Solid Films 517, 6401 (2009).
11. M. Z. Burrows, U. K. Das, R. L. Opila, S. De Wolf, and R. W. Birkmire, J. Vac. Sci. Technol. A 26, 683 (2008).
12. See e.g. http://www.ferro.com/Our+Products/Electronic/Products+and+Markets/Photovoltaic+Materials/.
13. R. Bock, J. Schmidt, and R. Brendel, Phys. Status Solidi RRL 2(6), 248 (2008).
14. M. Hofmann, C. Schmidt, N. Kohn, J. Rentsch, S. W. Glunz, and R. Preu, Prog. Photovolt., Res. Appl. 16, 509 (2008).
15. S. Gatz, H. Plagwitz, P. P. Altermatt, B. Terheiden, and R. Brendel, Appl. Phys. Lett. 93, 173502 (2008).
16. P. M. Gevers, J. J. H. Gielis, H. C. W. Beijerinck, M. C. M. van de Sanden, and W. M. M. Kessels, J. Vac. Sci. Technol. A 28, 293 (2010).
17. M. A. Wank, R. A. C. M. M. van Swaij, and M. C. M. van de Sanden, Appl. Phys. Lett. 95, 021503 (2009).
18. U. K. Das, M. Z. Burrows, M. Lu., S. Bowden, and R. W. Birkmire, Appl. Phys. Lett. 92, 063504 (2008).
19. A. Illiberi, K. Sharma, M. Creatore, and M. C. M. van de Sanden, Phys. Status Solidi RRL 4(7), 172 (2010).
20. A. H. M. Smets, W. M. M. Kessels, and M. C. M. van de Sanden, Appl. Phys. Lett. 82, 1547 (2005).
21. A. H. M. Smets, W. M. M. Kessels, and M. C. M. van de Sanden, Appl. Phys. Lett. 86, 041909 (2005).
22. J. J. H. Gielis, P. J. van den Oever, B. Hoex, M. C. M. van de Sanden, and W. M. M. Kessels, Phys. Rev. B 77, 205329 (2008).
23. S. Dauwe, J. Schmidt, and R. Hezel, Proceedings of the 29th IEEE Photovoltaic Specialists Conference (2002), p. 1246.
24. P. J. van den Oever, J. J. H. Gielis, M. C. M. van de Sanden, and W. M. M. Kessels, Thin Solid Films 516, 511 (2007).
25. J. Thiesen, H. M. Branz, and R. S. Crandall, Appl. Phys. Lett. 77, 3589 (2000).
26. H. Fujiwara and M. Kondo, Appl. Phys. Lett. 86, 032112 (2005).
27. J. Mitchell, D. Macdonald, and A. Cuevas, Appl. Phys. Lett. 94, 162102 (2009).
28. W. M. M. Kessels, R. J. Severens, M. C. M. van de Sanden, and D. C. Schram, J. Non-Cryst. Solids 227, 133 (1998).