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Volumn , Issue , 2002, Pages 1246-1249

Very low surface recombination velocities on p- and n-type silicon wafers passivated with hydrogenated amorphous silicon films

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; AMORPHOUS SILICON; ELECTRIC CONDUCTIVITY; HYDROGEN; OXIDES; PASSIVATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON NITRIDE; SILICON WAFERS; SURFACES; TEMPERATURE; THERMODYNAMIC STABILITY;

EID: 0036948749     PISSN: 01608371     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (150)

References (17)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.