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Journal of Applied Physics

Volumn 108, Issue 5, 2010, Pages

Disentangling fluxes of energy and matter in plasma-surface interactions: Effect of process parameters

(5) Wolter, M a,b Levchenko, I b,c Kersten, H a Kumar, S b,d Ostrikov, K b,c

a UNIVERSITY OF KIEL (Germany)

b CSIRO (Australia)

c UNIVERSITY OF SYDNEY (Australia)

d UNIVERSITY OF ULSTER (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON-BASED NANOSTRUCTURES; DISCHARGE POWER; ENERGY FLUX MEASUREMENTS; GAS COMPOSITIONS; LOW TEMPERATURE PLASMAS; NANOSCALE SYNTHESIS; PLASMA BULK; PLASMA-SURFACE INTERACTIONS; PRESSURE RANGES; PROCESS PARAMETERS; RADIO FREQUENCY DISCHARGES; RELATIVE IMPORTANCE; SUPPLY RATE; SURFACE TEMPERATURES;

PLASMA INTERACTIONS;

ELECTRIC DISCHARGES;

EID: 77956840641 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3475728 Document Type: Article

Times cited : (10)

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