메뉴 건너뛰기




Volumn 81, Issue 2, 2010, Pages

A calorimetric probe for plasma diagnostics

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION TECHNIQUES; ELECTRIC PROBE; ENERGETIC NEUTRAL ATOMS; HEATING POWER; LOW PRESSURES; MONOENERGETIC ELECTRONS;

EID: 77949298308     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3276707     Document Type: Conference Paper
Times cited : (64)

References (22)
  • 1
    • 0016083153 scopus 로고
    • 0022-5355. 10.1116/1.1312732
    • J. A. Thornton, J. Vac. Sci. Technol. 0022-5355 11, 666 (1974). 10.1116/1.1312732
    • (1974) J. Vac. Sci. Technol. , vol.11 , pp. 666
    • Thornton, J.A.1
  • 2
    • 67650083821 scopus 로고    scopus 로고
    • 0022-3727. 10.1088/0022-3727/42/4/043001
    • J. Han, J. Phys. D: Appl. Phys. 0022-3727 42, 043001 (2009). 10.1088/0022-3727/42/4/043001
    • (2009) J. Phys. D: Appl. Phys. , vol.42 , pp. 043001
    • Han, J.1
  • 7
    • 0004400828 scopus 로고
    • 0022-5355. 10.1116/1.575750
    • R. Visser, J. Vac. Sci. Technol. 0022-5355 7, 189 (1989). 10.1116/1.575750
    • (1989) J. Vac. Sci. Technol. , vol.7 , pp. 189
    • Visser, R.1
  • 10
    • 4344657125 scopus 로고    scopus 로고
    • 0022-5355. 10.1116/1.1705640
    • S. Ekpe and S. Dew, J. Vac. Sci. Technol. 0022-5355 22, 1420 (2004). 10.1116/1.1705640
    • (2004) J. Vac. Sci. Technol. , vol.22 , pp. 1420
    • Ekpe, S.1    Dew, S.2
  • 13
    • 34848905330 scopus 로고    scopus 로고
    • Measurement of energy transfer at an isolated substrate in a pulsed dc magnetron discharge
    • DOI 10.1063/1.2779287
    • M. Čada, J. Bradley, G. Clarke, and P. Kelly, J. Appl. Phys. 0021-8979 102, 063301 (2007). 10.1063/1.2779287 (Pubitemid 47508905)
    • (2007) Journal of Applied Physics , vol.102 , Issue.6 , pp. 063301
    • Cada, M.1    Bradley, J.W.2    Clarke, G.C.B.3    Kelly, P.J.4
  • 16
    • 0002312302 scopus 로고
    • 0040-6090. 10.1016/0040-6090(78)90273-0
    • J. A. Thornton, Thin Solid Films 0040-6090 54, 23 (1978). 10.1016/0040-6090(78)90273-0
    • (1978) Thin Solid Films , vol.54 , pp. 23
    • Thornton, J.A.1
  • 18
    • 19244376574 scopus 로고    scopus 로고
    • Investigations on the energy influx at plasma processes by means of a simple thermal probe
    • DOI 10.1016/S0040-6090(00)01442-5
    • H. Kersten, D. Rohde, J. Berndt, H. Deutsch, and R. Hippler, Thin Solid Films 0040-6090 377, 585 (2000). 10.1016/S0040-6090(00)01442-5 (Pubitemid 32035275)
    • (2000) Thin Solid Films , vol.377-378 , pp. 585-591
    • Kersten, H.1    Rohde, D.2    Berndt, J.3    Deutsch, H.4    Hippler, R.5
  • 19
    • 77949305750 scopus 로고    scopus 로고
    • Ph.D. thesis, Ernst-Moritz-Arndt-University Greifswald
    • R. Wiese, Ph.D. thesis, Ernst-Moritz-Arndt-University Greifswald, 2007.
    • (2007)
    • Wiese, R.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.