Angularly and spatially resolved measurements of the energy flux in an RF plasma using a thermal probe

Plasma Processes and Polymers

Volumn 6, Issue SUPPL. 1, 2009, Pages

  Wolter, Matthias ^a   Stahl, Marc ^a   Kersten, Holger ^a  

^a UNIVERSITY OF KIEL   (Germany)

Author keywords

Plasma diagnostic; Rf plasma; Thermal probe

Indexed keywords

A-THERMAL; ENERGY FLUXES; PLASMA PROCESS; REACTOR VESSEL; RF ELECTRODES; RF PLASMA; SECONDARY ELECTRON EMISSIONS; SPATIAL DISTRIBUTION; SPATIALLY RESOLVED; SPUTTERING PROCESS; THERMAL PROBE; TIME-DEPENDENT CHANGES; TOTAL ENERGY FLUX;

NUCLEAR REACTORS; PLASMA DIAGNOSTICS; PLASMA PROBES; PLASMA THEORY; SECONDARY EMISSION;

WAVE PLASMA INTERACTIONS;

EID: 77950488461     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200931604     Document Type: Conference Paper

References (13)

1. J. Thornton, J. Vac. Sci. Technol 1974, 11/4, 666.
2. H. Steffen, H. Kersten, H. Wulff, J. Vac. Sci. Technol 1994, A 12, 2780.
3. H. Kersten, H. Steffen, D. Vender, H. E. Wagner, Vacuum 1995, 46, 305.
4. R. Nimmagadda, R. Bunshah, J. Vac. Sci. Technol. 1971, 8/6, 677.
5. R. Chow, R. Bunshah, J. Vac. Sci. Technol 1971, 8/6, 665.
6. J. Thornton, Thin Solid Films 1978, 54, 23.
7. H. Kersten, E. Stoffels, W. Stoffels, M. Otte, C. Csambal, H. Deutsch, R. Hippler, J. Appl. Phys. 2000, 87, 3637.
8. H. Kersten, H. Deutsch, H. Steffen, G. M. Kroesen, R. Hippler, Vacuum 2001, 63, 385.
9. K. Wendt, R. Ellmer, K. Wiesemann, J. Appl Phys. 1997, 82/5, 2115.
10. M. Wolter, A. Melzer, Phys. Rev. E 2005, E71, 036414.
11. M. Wolter, M. Stahl, H. Kersten, Vacuum 2009, 83, 768.
12. K. Hosaka, H. Tawara, Phys. Scr. 1999, 80, 238.
13. R. Kawano, B. M. Annaratone, J. E. Allen, Conf. Proc. ICPIG 1991, 1099, 1991.