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Volumn 96, Issue 13, 2010, Pages

Hydrogen in plasma-nanofabrication: Selective control of nanostructure heating and passivation

Author keywords

[No Author keywords available]

Indexed keywords

AR PLASMAS; CRYSTALLINITIES; EFFECTIVE MECHANISMS; ENERGY DEPOSITIONS; ENERGY FLUX MEASUREMENTS; HEAT RELEASE; IN-SITU; INDEPENDENT CONTROL; NANOFABRICATION; PLASMA-AIDED NANOFABRICATION; SELECTIVE CONTROL; SEQUENTIAL ADDITION; SURFACE FLUX; SURFACE PASSIVATION;

EID: 77950489718     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3374324     Document Type: Article
Times cited : (49)

References (19)
  • 1
    • 70350573448 scopus 로고    scopus 로고
    • NMAACR 1476-1122, () 10.1038/nmat2531;, Appl. Phys. Lett. APPLAB 0003-6951 79, 1546 (2001). 10.1063/1.1401089
    • W. H. Chiang and R. M. Sankaran, Nature Mater. NMAACR 1476-1122 8, 882 (2009) 10.1038/nmat2531; M. K. Sunkara, S. Sharma, R. Miranda, G. Lian, and E. C. Dickey, Appl. Phys. Lett. APPLAB 0003-6951 79, 1546 (2001). 10.1063/1.1401089
    • (2009) Nature Mater. , vol.8 , pp. 882
    • Chiang, W.H.1    Sankaran, R.M.2    Sunkara, M.K.3    Sharma, S.4    Miranda, R.5    Lian, G.6    Dickey, E.C.7
  • 2
    • 26244451229 scopus 로고    scopus 로고
    • Reactive plasmas as a versatile nanofabrication tool
    • DOI 10.1103/RevModPhys.77.489
    • K. Ostrikov, Rev. Mod. Phys. RMPHAT 0034-6861 77, 489 (2005). 10.1103/RevModPhys.77.489 (Pubitemid 41508765)
    • (2005) Reviews of Modern Physics , vol.77 , Issue.2 , pp. 489-511
    • Ostrikov, K.1
  • 3
    • 42349098604 scopus 로고    scopus 로고
    • APPLAB 0003-6951, () 10.1063/1.2912039;, Appl. Phys. Lett. APPLAB 0003-6951 90, 173112 (2007). 10.1063/1.2731728
    • D. Mariotti, Appl. Phys. Lett. APPLAB 0003-6951 92, 151505 (2008) 10.1063/1.2912039; Q. Cheng, S. Xu, J. Long, and K. Ostrikov, Appl. Phys. Lett. APPLAB 0003-6951 90, 173112 (2007). 10.1063/1.2731728
    • (2008) Appl. Phys. Lett. , vol.92 , pp. 151505
    • Mariotti, D.1    Cheng, Q.2    Xu, S.3    Long, J.4    Ostrikov, K.5
  • 4
    • 52949114915 scopus 로고    scopus 로고
    • CRBNAH 0008-6223,. 10.1016/j.carbon.2008.08.002
    • A. Shashurin and M. Keidar, Carbon CRBNAH 0008-6223 46, 1826 (2008). 10.1016/j.carbon.2008.08.002
    • (2008) Carbon , vol.46 , pp. 1826
    • Shashurin, A.1    Keidar, M.2
  • 5
    • 41649109023 scopus 로고    scopus 로고
    • Nanowire sensor response to reactive gas environment
    • DOI 10.1063/1.2905265
    • U. Cvelbar, K. Ostrikov, A. Drenik, and M. Mozetic, Appl. Phys. Lett. APPLAB 0003-6951 92, 133505 (2008). 10.1063/1.2905265 (Pubitemid 351483709)
    • (2008) Applied Physics Letters , vol.92 , Issue.13 , pp. 133505
    • Cvelbar, U.1    Ostrikov, K.2    Drenik, A.3    Mozetic, M.4
  • 6
    • 39349117665 scopus 로고    scopus 로고
    • Plasma/ion-controlled metal catalyst saturation: Enabling simultaneous growth of carbon nanotube/nanocone arrays
    • DOI 10.1063/1.2841845
    • I. Levchenko and K. Ostrikov, Appl. Phys. Lett. APPLAB 0003-6951 92, 063108 (2008). 10.1063/1.2841845 (Pubitemid 351263850)
    • (2008) Applied Physics Letters , vol.92 , Issue.6 , pp. 063108
    • Levchenko, I.1    Ostrikov, K.2
  • 8
    • 34248570861 scopus 로고    scopus 로고
    • JPAPBE 0022-3727, () 10.1088/0022-3727/40/8/S01;, J. Phys. D JPAPBE 0022-3727 41, 132004 (2008). 10.1088/0022-3727/41/13/132004
    • K. Ostrikov and A. B. Murphy, J. Phys. D JPAPBE 0022-3727 40, 2223 (2007) 10.1088/0022-3727/40/8/S01; I. Levchenko, K. Ostrikov, M. Keidar, and U. Cvelbar, J. Phys. D JPAPBE 0022-3727 41, 132004 (2008). 10.1088/0022-3727/41/13/ 132004
    • (2007) J. Phys. D , vol.40 , pp. 2223
    • Ostrikov, K.1    Murphy, A.B.2    Levchenko, I.3    Ostrikov, K.4    Keidar, M.5    Cvelbar, U.6
  • 9
    • 34548678442 scopus 로고    scopus 로고
    • Plasma-assisted self-sharpening of platelet-structured single-crystalline carbon nanocones
    • DOI 10.1063/1.2784932
    • I. Levchenko, K. Ostrikov, J. D. Long, and S. Xu, Appl. Phys. Lett. APPLAB 0003-6951 91, 113115 (2007). 10.1063/1.2784932 (Pubitemid 47416031)
    • (2007) Applied Physics Letters , vol.91 , Issue.11 , pp. 113115
    • Levchenko, I.1    Ostrikov, K.2    Long, J.D.3    Xu, S.4
  • 10
    • 77449092710 scopus 로고    scopus 로고
    • NNOTER 0957-4484, () 10.1088/0957-4484/21/2/025605;, Nanotechnology NNOTER 0957-4484 19, 335703 (2008). 10.1088/0957-4484/19/33/335703
    • I. Levchenko, S. Y. Huang, K. Ostrikov, and S. Xu, Nanotechnology NNOTER 0957-4484 21, 025605 (2010) 10.1088/0957-4484/21/2/025605; I. Levchenko and K. Ostrikov, Nanotechnology NNOTER 0957-4484 19, 335703 (2008). 10.1088/0957-4484/19/33/335703
    • (2010) Nanotechnology , vol.21 , pp. 025605
    • Levchenko, I.1    Huang, S.Y.2    Ostrikov, K.3    Xu, S.4    Levchenko, I.5    Ostrikov, K.6
  • 11
    • 56949089545 scopus 로고    scopus 로고
    • CRBNAH 0008-6223,. 10.1016/j.carbon.2008.10.005
    • I. Levchenko, K. Ostrikov, and D. Mariotti, Carbon CRBNAH 0008-6223 47, 344 (2009). 10.1016/j.carbon.2008.10.005
    • (2009) Carbon , vol.47 , pp. 344
    • Levchenko, I.1    Ostrikov, K.2    Mariotti, D.3
  • 12
    • 34547730770 scopus 로고    scopus 로고
    • Plasma-assisted self-organized growth of uniform carbon nanocone arrays
    • DOI 10.1016/j.carbon.2007.05.030, PII S0008622307002588
    • Z. L. Tsakadze, I. Levchenko, K. Ostrikov, and S. Xu, Carbon CRBNAH 0008-6223 45, 2022 (2007). 10.1016/j.carbon.2007.05.030 (Pubitemid 47238075)
    • (2007) Carbon , vol.45 , Issue.10 , pp. 2022-2030
    • Tsakadze, Z.L.1    Levchenko, I.2    Ostrikov, K.3    Xu, S.4
  • 13
    • 0037019294 scopus 로고    scopus 로고
    • Mechanism of hydrogen-induced crystallization of amorphous silicon
    • DOI 10.1038/nature00866
    • S. Sriraman, S. Agarwal, E. S. Aydil, and D. Maroudas, Nature (London) NATUAS 0028-0836 418, 62 (2002). 10.1038/nature00866 (Pubitemid 34742569)
    • (2002) Nature , vol.418 , Issue.6893 , pp. 62-65
    • Sriraman, S.1    Agarwal, S.2    Aydil, E.S.3    Maroudas, D.4
  • 15
    • 34547309850 scopus 로고    scopus 로고
    • Ion-assisted precursor dissociation and surface diffusion: Enabling rapid, low-temperature growth of carbon nanofibers
    • DOI 10.1063/1.2750392
    • I. Denysenko and K. Ostrikov, Appl. Phys. Lett. APPLAB 0003-6951 90, 251501 (2007). 10.1063/1.2750392 (Pubitemid 47141182)
    • (2007) Applied Physics Letters , vol.90 , Issue.25 , pp. 251501
    • Denysenko, I.1    Ostrikov, K.2
  • 17
    • 0035797580 scopus 로고    scopus 로고
    • The energy balance at substrate surfaces during plasma processing
    • DOI 10.1016/S0042-207X(01)00350-5, PII S0042207X01003505
    • H. Kersten, H. Deutsch, H. Steffen, G. M. W. Kroesen, and R. Hippler, Vacuum VACUAV 0042-207X 63, 385 (2001). 10.1016/S0042-207X(01)00350-5 (Pubitemid 32704939)
    • (2001) Vacuum , vol.63 , Issue.3 , pp. 385-431
    • Kersten, H.1    Deutsch, H.2    Steffen, H.3    Kroesen, G.M.W.4    Hippler, R.5
  • 18
    • 70450179702 scopus 로고    scopus 로고
    • JPAPBE 0022-3727,. 10.1088/0022-3727/42/21/213001
    • M. Meyyappan, J. Phys. D JPAPBE 0022-3727 42, 213001 (2009). 10.1088/0022-3727/42/21/213001
    • (2009) J. Phys. D , vol.42 , pp. 213001
    • Meyyappan, M.1
  • 19
    • 0041808605 scopus 로고
    • ANCEAD 0044-8249,. 10.1002/ange.19780900608
    • W. J. Richter and H. Schwarz, Angew. Chem. ANCEAD 0044-8249 90, 449 (1978). 10.1002/ange.19780900608
    • (1978) Angew. Chem. , vol.90 , pp. 449
    • Richter, W.J.1    Schwarz, H.2


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