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Electrochemical and Solid-State Letters

Volumn 13, Issue 11, 2010, Pages

Thin film ag masking for deep glass micromachining

(4) Lee, Hing Wah a Bien, Daniel C S a Badaruddin, Siti Aishah Mohamad a Teh, Aun Shih a

a Technology Park Malaysia (Malaysia)

Author keywords

[No Author keywords available]

Indexed keywords

ETCH DEPTH; GLASS MICROMACHINING; ISOTROPIC ETCHING; LOW COSTS; MASKING MATERIAL; MICRO-FLUIDIC DEVICES; SILVER FILM;

DEIONIZED WATER; GLASS; HYDROFLUORIC ACID; NITRIC ACID; THIN FILMS; VAPOR DEPOSITION;

SILVER;

EID: 77956594485 PISSN: 10990062 EISSN: None Source Type: Journal
DOI: 10.1149/1.3483163 Document Type: Article

Times cited : (5)

References (25)

1
- 0035337220
- Deep wet etching of fused silica glass for hollow capillary optical leaky waveguides in microfluidic devices
- DOI 10.1088/0960-1317/11/3/315, PII S0960131701199407
- A. Grosse, M. Grewe, and H. Fouckhardt, J. Micromech. Microeng. JMMIEZ 0960-1317, 11, 257 (2001). 10.1088/0960-1317/11/3/315 (Pubitemid 32471815)
- (2001) Journal of Micromechanics and Microengineering , vol.11 , Issue.3 , pp. 257-262
- Grosse, A.¹ Grewe, M.² Fouckhardt, H.³

2
- 0035505906
- A fast prototyping process for fabrication of microfluidic systems on soda-lime glass
- DOI 10.1088/0960-1317/11/6/316, PII S0960131701272295
- C. -H. Lin, G. -B. Lee, Y. -H. Lin, and G. -L. Chang, J. Micromech. Microeng. JMMIEZ 0960-1317, 11, 726 (2001). 10.1088/0960-1317/11/6/316 (Pubitemid 33084909)
- (2001) Journal of Micromechanics and Microengineering , vol.11 , Issue.6 , pp. 726-732
- Lin, C.-H.¹ Lee, G.-B.² Lin, Y.-H.³ Chang, G.-L.⁴

3
- 0141830186
- JMMIEZ 0960-1317,. 10.1088/0960-1317/13/5/305
- D. C. S. Bien, P. V. Rainey, S. J. N. Mitchell, and H. S. Gamble, J. Micromech. Microeng. JMMIEZ 0960-1317, 13, 557 (2003). 10.1088/0960-1317/13/5/ 305
- (2003) J. Micromech. Microeng. , vol.13 , pp. 557
- Bien, D.C.S.¹ Rainey, P.V.² Mitchell, S.J.N.³ Gamble, H.S.⁴

4
- 0032021451
- JMMIEZ 0960-1317,. 10.1088/0960-1317/8/1/006
- M. Stjernström and J. Roeraade, J. Micromech. Microeng. JMMIEZ 0960-1317, 8, 33 (1998). 10.1088/0960-1317/8/1/006
- (1998) J. Micromech. Microeng. , vol.8 , pp. 33
- Stjernström, M.¹ Roeraade, J.²

5
- 10744227060
- LCAHAM 1473-0197,. 10.1039/b103846j
- I. Schneega, R. Brautigam, and J. M. Kohler, Lab Chip LCAHAM 1473-0197, 1, 42 (2001). 10.1039/b103846j
- (2001) Lab Chip , vol.1 , pp. 42
- Schneega, I.¹ Brautigam, R.² Kohler, J.M.³

6
- 0005397454
- ZZZZZZ 1387-2176,. 10.1023/A:1009922004301
- P. C. Simpson, A. T. Woolley, and R. A. Mathies, Biomed. Microdevices ZZZZZZ 1387-2176, 1, 7 (1998). 10.1023/A:1009922004301
- (1998) Biomed. Microdevices , vol.1 , pp. 7
- Simpson, P.C.¹ Woolley, A.T.² Mathies, R.A.³

7
- 70349970824
- JMMIEZ 0960-1317,. 10.1088/0960-1317/19/6/065013
- H. Zhu, M. Holl, T. Ray, S. Bhushan, and D. R. Meldrum, J. Micromech. Microeng. JMMIEZ 0960-1317, 19, 065013 (2009). 10.1088/0960-1317/19/6/065013
- (2009) J. Micromech. Microeng. , vol.19 , pp. 065013
- Zhu, H.¹ Holl, M.² Ray, T.³ Bhushan, S.⁴ Meldrum, D.R.⁵

8
- 75749154387
- LCAHAM 1473-0197,. 10.1039/b912770d
- N. Pekas, Q. Zhang, M. Nannini, and D. Juncker, Lab Chip LCAHAM 1473-0197, 10, 494 (2010). 10.1039/b912770d
- (2010) Lab Chip , vol.10 , pp. 494
- Pekas, N.¹ Zhang, Q.² Nannini, M.³ Juncker, D.⁴

9
- 34248999479
- Application of PECVD SiC in glass micromachining
- DOI 10.1088/0960-1317/17/4/014, PII S0960131707390785, 014
- H. Zhang, H. Guo, Z. Chen, G. Zhang, and Z. Li, J. Micromech. Microeng. JMMIEZ 0960-1317, 17, 775 (2007). 10.1088/0960-1317/17/4/014 (Pubitemid 46778434)
- (2007) Journal of Micromechanics and Microengineering , vol.17 , Issue.4 , pp. 775-780
- Zhang, H.¹ Guo, H.² Chen, Z.³ Zhang, G.⁴ Li, Z.⁵

10
- 33846516959
- Strategies in deep wet etching of Pyrex glass
- DOI 10.1016/j.sna.2006.06.044, PII S0924424706004390
- C. Iliescu, F. E. H. Tay, and J. Miao, Sens. Actuators, A SAAPEB 0924-4247, 133, 395 (2007). 10.1016/j.sna.2006.06.044 (Pubitemid 46164881)
- (2007) Sensors and Actuators, A: Physical , vol.133 , Issue.SPEC. ISS. , pp. 395-400
- Iliescu, C.¹ Tay, F.E.H.² Miao, J.³

11
- 15544373657
- Characterization of masking layers for deep wet etching of glass in an improved HF/HCl solution
- DOI 10.1016/j.surfcoat.2004.10.094, PII S0257897204010990
- C. Iliescu, J. Jing, F. E. H. Tay, J. Miao, and T. Sun, Surf. Coat. Technol. SCTEEJ 0257-8972, 198, 314 (2005). 10.1016/j.surfcoat.2004.10.094 (Pubitemid 40854702)
- (2005) Surface and Coatings Technology , vol.198 , Issue.SPEC. ISS. , pp. 314-318
- Iliescu, C.¹ Jing, J.² Tay, F.E.H.³ Miao, J.⁴ Sun, T.⁵

12
- 69749109847
- SAAPEB 0924-4247,. 10.1016/j.sna.2004.03.004
- C. Iliescu, J. Miao, and F. E. H. Tay, Sens. Actuators, A SAAPEB 0924-4247, 117, 286 (2005). 10.1016/j.sna.2004.03.004
- (2005) Sens. Actuators, A , vol.117 , pp. 286
- Iliescu, C.¹ Miao, J.² Tay, F.E.H.³

13
- 67849088790
- JMMIEZ 0960-1317,. 10.1088/0960-1317/19/6/067001
- F. Ceyssens and R. Puers, J. Micromech. Microeng. JMMIEZ 0960-1317, 19, 067001 (2009). 10.1088/0960-1317/19/6/067001
- (2009) J. Micromech. Microeng. , vol.19 , pp. 067001
- Ceyssens, F.¹ Puers, R.²

14
- 0031147386
- SAAPEB 0924-4247,. 10.1016/S0924-4247(97)01360-5
- M. A. Grettilat, F. Paoletti, P. Thiebaud, S. Roth, M. Kondelka-Hep, and N. F. de Rooij, Sens. Actuators, A SAAPEB 0924-4247, 60, 219 (1997). 10.1016/S0924-4247(97)01360-5
- (1997) Sens. Actuators, A , vol.60 , pp. 219
- Grettilat, M.A.¹ Paoletti, F.² Thiebaud, P.³ Roth, S.⁴ Kondelka-Hep, M.⁵ De Rooij, N.F.⁶

15
- 0032090541
- JMMIEZ 0960-1317,. 10.1088/0960-1317/8/2/010
- T. Corman, P. Enoksson, and G. Stemme, J. Micromech. Microeng. JMMIEZ 0960-1317, 8, 84 (1998). 10.1088/0960-1317/8/2/010
- (1998) J. Micromech. Microeng. , vol.8 , pp. 84
- Corman, T.¹ Enoksson, P.² Stemme, G.³

16
- 40949132967
- On the wet etching of Pyrex glass
- DOI 10.1016/j.sna.2007.11.022, PII S0924424707008527
- C. Iliescu, B. Chen, and J. Miao, Sens. Actuators, A SAAPEB 0924-4247, 143, 154 (2008). 10.1016/j.sna.2007.11.022 (Pubitemid 351417377)
- (2008) Sensors and Actuators, A: Physical , vol.143 , Issue.1 , pp. 154-161
- Iliescu, C.¹ Chen, B.² Miao, J.³

17
- 0141995822
- LCAHAM 1473-0197,. 10.1039/b109031n
- E. T. Lagally, C. A. Emrich, and R. A. Mathies, Lab Chip LCAHAM 1473-0197, 1, 102 (2001). 10.1039/b109031n
- (2001) Lab Chip , vol.1 , pp. 102
- Lagally, E.T.¹ Emrich, C.A.² Mathies, R.A.³

18
- 0036771758
- ELCTDN 0173-0835,. 10.1002/1522-2683(200210) 23:20<3511::AID- ELPS35113.0.CO;2-C
- A. Berthold, F. Laugere, H. Schellevis, C. R. de Boer, M. Laros, R. M. Guijt, P. M. Sarro, and M. J. Vellekoop, Electrophoresis ELCTDN 0173-0835, 23, 3511 (2002). 10.1002/1522-2683(200210)23:20<3511::AID-ELPS35113.0.CO;2-C
- (2002) Electrophoresis , vol.23 , pp. 3511
- Berthold, A.¹ Laugere, F.² Schellevis, H.³ De Boer, C.R.⁴ Laros, M.⁵ Guijt, R.M.⁶ Sarro, P.M.⁷ Vellekoop, M.J.⁸

19
- 4544233318
- SAAPEB 0924-4247.
- M. Bu, T. Melvin, G. J. Ensell, J. S. Wilkinson, and A. G. R. Evans, Sens. Actuators, A SAAPEB 0924-4247, 115, 476 (2004).
- (2004) Sens. Actuators, A , vol.115 , pp. 476
- Bu, M.¹ Melvin, T.² Ensell, G.J.³ Wilkinson, J.S.⁴ Evans, A.G.R.⁵

20
- 33747591631
- Defect-free wet etching through pyrex glass using Cr/Au mask
- DOI 10.1007/s00542-006-0116-0, Symposium on Design, Test, Intergration and Packaging of MEMS/MOEMS
- F. E. H. Tay, C. Iliescu, J. Jing, and J. Miao, Microsyst. Technol. MCTCEF 0946-7076, 12, 935 (2006). 10.1007/s00542-006-0116-0 (Pubitemid 44267981)
- (2006) Microsystem Technologies , vol.12 , Issue.10-11 , pp. 935-939
- Tay, F.E.H.¹ Iliescu, C.² Jing, J.³ Miao, J.⁴

21
- 77956592215
- Schott AG Borofloat 33 Product Information, last accessed June 25, 2010.
- Schott AG Borofloat 33 Product Information, http://www.schott.com/ borofloat/english/download/borofloat-33-e.pdf, last accessed June 25, 2010.

22
- 33751118022
- JSTEFX 0861-9786.
- S. K. Sadrnezhaad, E. Ahmadi, and M. Mozammel, J. Mater. Sci. Technol. JSTEFX 0861-9786, 22, 696 (2006).
- (2006) J. Mater. Sci. Technol. , vol.22 , pp. 696
- Sadrnezhaad, S.K.¹ Ahmadi, E.² Mozammel, M.³

23
- 77956589880
- in.
- M. Grass, R. M. Rioux, C. Hall, P. D. Yang, and G. A. Somorjai, in Proceedings of the 20th North American Catalysis Society Meeting (2007).
- (2007) Proceedings of the 20th North American Catalysis Society Meeting
- Grass, M.¹ Rioux, R.M.² Hall, C.³ Yang, P.D.⁴ Somorjai, G.A.⁵

24
- 0030420887
- JMIYET 1057-7157,. 10.1109/84.546406
- K. R. Williams and R. S. Muller, J. Microelectromech. Syst. JMIYET 1057-7157, 5, 256 (1996). 10.1109/84.546406
- (1996) J. Microelectromech. Syst. , vol.5 , pp. 256
- Williams, K.R.¹ Muller, R.S.²

25
- 58149159399
- APPLAB 0003-6951,. 10.1063/1.3054640
- J. H. Park and N. R. Aluru, Appl. Phys. Lett. APPLAB 0003-6951, 93, 253104 (2008). 10.1063/1.3054640
- (2008) Appl. Phys. Lett. , vol.93 , pp. 253104
- Park, J.H.¹ Aluru, N.R.²

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