Deep etching of glass wafers using sputtered molybdenum masks

Journal of Micromechanics and Microengineering

Volumn 19, Issue 6, 2009, Pages

  Ceyssens, Frederik ^a   Puers, Robert ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

DEEP ETCHING; GLASS WAFER; LOW-COST TECHNOLOGY; MASK LAYER;

GLASS; MOLYBDENUM;

ETCHING;

EID: 67849088790     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/6/067001     Document Type: Article

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