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Volumn 10, Issue 4, 2010, Pages 494-498

Wet-etching of structures with straight facets and adjustable taper into glass substrates

(4) Pekas, Nikola a Zhang, Qing a Nannini, Matthieu a Juncker, David a

a MCGILL UNIVERSITY (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

GLASS; GOLD; HYDROFLUORIC ACID; TITANIUM;

ACCURACY; ARTICLE; DISSOLUTION; ELECTRODE; MICROFLUIDIC ANALYSIS; PRIORITY JOURNAL; REGULATORY MECHANISM; SEAT; STRUCTURE ANALYSIS; SURFACE PROPERTY;

EID: 75749154387 PISSN: 14730197 EISSN: 14730189 Source Type: Journal
DOI: 10.1039/b912770d Document Type: Article

Times cited : (37)

References (26)

1
- 0005397454
- P. C. Simpson A. T. Woolley R. A. Mathies Biomed. Microdevices 1998 1 7 26
- (1998) Biomed. Microdevices , vol.1 , pp. 7-26
- Simpson, P.C.¹ Woolley, A.T.² Mathies, R.A.³

2
- 0004084050
- CRC Press, Boca Raton, Fla., London
- M. J. Madou, Fundamentals of microfabrication: the science of miniaturization, CRC Press, Boca Raton, Fla., London, 2002
- (2002) Fundamentals of Microfabrication: The Science of Miniaturization
- Madou, M.J.¹

3
- 59649102718
- T. D. Perroud R. J. Meagher M. P. Kanouff R. F. Renzi M. Wu A. K. Singh K. D. Patel Lab Chip 2009 9 507 515
- (2009) Lab Chip , vol.9 , pp. 507-515
- Perroud, T.D.¹ Meagher, R.J.² Kanouff, M.P.³ Renzi, R.F.⁴ Wu, M.⁵ Singh, A.K.⁶ Patel, K.D.⁷

4
- 4544233318
- M. Bu T. Melvin G. J. Ensell J. S. Wilkinson A. G. R. Evans Sens. Actuators, A 2004 115 476 482
- (2004) Sens. Actuators, A , vol.115 , pp. 476-482
- Bu, M.¹ Melvin, T.² Ensell, G.J.³ Wilkinson, J.S.⁴ Evans, A.G.R.⁵

5
- 24044550345
- Y. Mourzina A. Steffen A. Offenhaeusser Microsyst. Technol. 2005 11 135 140
- (2005) Microsyst. Technol. , vol.11 , pp. 135-140
- Mourzina, Y.¹ Steffen, A.² Offenhaeusser, A.³

6
- 40949132967
- C. Iliescu B. Chen J. Miao Sens. Actuators, A 2008 143 154 161
- (2008) Sens. Actuators, A , vol.143 , pp. 154-161
- Iliescu, C.¹ Chen, B.² Miao, J.³

7
- 75749154244
- Z. Haixin H. Mark R. Tathagata B. Shivani R. M. Deirdre J. Micromech. Microeng. 2009 065013
- (2009) J. Micromech. Microeng. , pp. 065013
- Haixin, Z.¹ Mark, H.² Tathagata, R.³ Shivani, B.⁴ Deirdre, R.M.⁵

8
- 0034615958
- M. A. Unger H.-P. Chou T. Thorsen A. Scherer S. R. Quake Science 2000 288 113 116
- (2000) Science , vol.288 , pp. 113-116
- Unger, M.A.¹ Chou, H.-P.² Thorsen, T.³ Scherer, A.⁴ Quake, S.R.⁵

9
- 34547660120
- A. Pandolfi M. Ortiz J. Micromech. Microeng. 2007 17 1487 1493
- (2007) J. Micromech. Microeng. , vol.17 , pp. 1487-1493
- Pandolfi, A.¹ Ortiz, M.²

10
- 0028698326
- K. Sato M. Shikida J. Micromech. Microeng. 1994 4 205
- (1994) J. Micromech. Microeng. , vol.4 , pp. 205
- Sato, K.¹ Shikida, M.²

11
- 36949012285
- B. Byunghoon H. Jeahyeong R. I. Masel M. A. Shannon Journal of Microelectromechanical Systems 2007 16 1461 1471
- (2007) Journal of Microelectromechanical Systems , vol.16 , pp. 1461-1471
- Byunghoon, B.¹ Jeahyeong, H.² Masel, R.I.³ Shannon, M.A.⁴

12
- 18844363454
- R. Jindal J. L. Plawsky S. M. Cramer Langmuir 2005 21 4458 4463
- (2005) Langmuir , vol.21 , pp. 4458-4463
- Jindal, R.¹ Plawsky, J.L.² Cramer, S.M.³

13
- 0028053387
- IEEE
- W. Henke, W. Hoppe, H. J. Quenzer, P. Staudt-Fischbach and B. Wagner, in MEMS '94, Proceedings of IEEE Workshop on MEMS '94, Oiso, Japan, IEEE, 1994, pp. 205-210
- (1994) MEMS '94, Proceedings of IEEE Workshop on MEMS '94, Oiso, Japan , pp. 205-210
- Henke, W.¹ Hoppe, W.² Quenzer, H.J.³ Staudt-Fischbach, P.⁴ Wagner In, B.⁵

14
- 0037452586
- C. Chen D. Hirdes A. Folch Proc. Natl. Acad. Sci. U. S. A. 2003 100 1499 1504
- (2003) Proc. Natl. Acad. Sci. U. S. A. , vol.100 , pp. 1499-1504
- Chen, C.¹ Hirdes, D.² Folch, A.³

15
- 34249060317
- Y. Hirai Y. Inamoto K. Sugano T. Tsuchiya O. Tabata J. Micromech. Microeng. 2007 17 199 206
- (2007) J. Micromech. Microeng. , vol.17 , pp. 199-206
- Hirai, Y.¹ Inamoto, Y.² Sugano, K.³ Tsuchiya, T.⁴ Tabata, O.⁵

16
- 42549157074
- A. Ghobeity J. K. Spelt M. Papini J. Micromech. Microeng. 2008 18 055014
- (2008) J. Micromech. Microeng. , vol.18 , pp. 055014
- Ghobeity, A.¹ Spelt, J.K.² Papini, M.³

17
- 75749129641
- M. Takashi T. Takehisa M. Eiji K. Takahiro S. Takayuki J. Micromech. Microeng. 2009 015031
- (2009) J. Micromech. Microeng. , pp. 015031
- Takashi, M.¹ Takehisa, T.² Eiji, M.³ Takahiro, K.⁴ Takayuki, S.⁵

18
- 0033307723
- IEEE
- V. Fascio, R. Wuthrich, D. Viquerat and H. Langen, in Proceedings of 1999 International Symposium on Micromechatronics and Human Science, Nagoya, Japan, IEEE, 1999, pp. 179-183
- (1999) Proceedings of 1999 International Symposium on Micromechatronics and Human Science, Nagoya, Japan , pp. 179-183
- Fascio, V.¹ Wuthrich, R.² Viquerat, D.³ Langen In, H.⁴

19
- 0342792008
- M. E. Straumanis P. C. Chen J. Electrochem. Soc. 1951 98 234 250
- (1951) J. Electrochem. Soc. , vol.98 , pp. 234-250
- Straumanis, M.E.¹ Chen, P.C.²

20
- 0004085522
- Butterworths scientific publications, London
- A. D. McQuillan and M. K. McQuillan, Titanium, Butterworths scientific publications, London, 1956
- (1956) Titanium
- McQuillan, A.D.¹ McQuillan, M.K.²

21
- 0742286720
- K. R. Williams K. Gupta M. Wasilik Journal of Microelectromechanical Systems 2003 12 761 778
- (2003) Journal of Microelectromechanical Systems , vol.12 , pp. 761-778
- Williams, K.R.¹ Gupta, K.² Wasilik, M.³

22
- 15544373657
- C. Iliescu J. Jing F. E. H. Tay J. Miao T. Sun Surf. Coat. Technol. 2005 198 314 318
- (2005) Surf. Coat. Technol. , vol.198 , pp. 314-318
- Iliescu, C.¹ Jing, J.² Tay, F.E.H.³ Miao, J.⁴ Sun, T.⁵

23
- 0003952404
- W. J. James and M. E. Straumanis, in Encyclopedia of the Electrochemistry of Elements, 1976, pp. 305-395
- (1976) Encyclopedia of the Electrochemistry of Elements , pp. 305-395
- James, W.J.¹ Straumanis In, M.E.²

24
- 0004169805
- ASM International, Materials Park, OH
- M. J. Donachie, Titanium: a technical guide, ASM International, Materials Park, OH, 2000
- (2000) Titanium: A Technical Guide
- Donachie, M.J.¹

25
- 85022118043
- International Business Machines Corporation, USA). Application: WO 2002-IB395, 2002064495
- M. Despont, U. Drechsler, G. Genolet and P. Vettiger, (International Business Machines Corporation, USA). Application: WO 2002-IB395, 2002064495, 2002
- (2002)
- Despont, M.¹ Drechsler, U.² Genolet, G.³ Vettiger, P.⁴

26
- 18844432122
- S. Metz A. Bertsch P. Renaud Journal of Microelectromechanical Systems 2005 14 383 391
- (2005) Journal of Microelectromechanical Systems , vol.14 , pp. 383-391
- Metz, S.¹ Bertsch, A.² Renaud, P.³

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