A new fabrication method for borosilicate glass capillary tubes with lateral inlets and outlets

Sensors and Actuators, A: Physical

Volumn 60, Issue 1-3, 1997, Pages 219-222

  Grétillat, Marc Alexis ^a   Paoletti, Florence ^a   Thiébaud, Pierre ^a   Roth, Sylvain ^a   Koudelka Hep, Milena ^a   De Rooij, Nicolas F ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

Borosilicate glass; Capillary tubes; Miniaturized total chemical analysis systems

Indexed keywords

BONDING; BOROSILICATE GLASS; CHEMICAL ANALYSIS; CHEMICAL VAPOR DEPOSITION; FABRICATION; MICROMACHINING; PHOTOLITHOGRAPHY; REACTIVE ION ETCHING;

BOROSILICATE GLASS CAPILLARY TUBES; LOW PRESSURE CHEMICAL VAPOR DEPOSITION; MINIATURIZED TOTAL CHEMICAL ANALYSIS SYSTEM; WET CHEMICAL ETCHING;

CAPILLARY TUBES;

EID: 0031147386     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01360-5     Document Type: Article

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