Fault diagnosis of MEMS lateral comb resonators using multiple-model adaptive estimators

IEEE Transactions on Control Systems Technology

Volumn 18, Issue 5, 2010, Pages 1233-1240

  Izadian, Afshin ^a   Famouri, Parviz ^b  

^a Indiana University Purdue University Indianapolis   (United States)

^b West Virginia University   (United States)

Author keywords

Adaptive estimators; fault diagnosis; Kalman filtering; lateral comb resonators (LCRs)

Indexed keywords

ADAPTIVE ESTIMATORS; ELECTRIC CIRCUIT; FAULT DIAGNOSIS; FAULT DIAGNOSTICS; FAULT MODELING; KALMAN-FILTERING; LATERAL COMB RESONATORS; MICRO-ELECTRO-MECHANICAL; MICROELECTROMECHANICAL SYSTEMS; MULTIPLE MODEL ADAPTIVE ESTIMATION; MULTIPLE MODELS; REAL-TIME APPLICATION; STRUCTURAL VARIATIONS;

COMPOSITE MICROMECHANICS; ELECTRIC NETWORK ANALYSIS; ELECTRIC TOOLS; KALMAN FILTERS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; REAL TIME SYSTEMS; RELIABILITY ANALYSIS; RESONATORS;

ESTIMATION;

EID: 77956231971     PISSN: 10636536     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCST.2009.2036717     Document Type: Article

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