Testing of MEMS material properties and stability

AUTOTESTCON (Proceedings)

Volumn , Issue , 1998, Pages 161-162

  Brown, Stuart B ^a   Muhlstein, Christopher ^a   Chui, Clarence ^a   Abnet, Catneron ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

CRACK INITIATION; CRACK PROPAGATION; CRYSTAL MICROSTRUCTURE; ELECTRONIC EQUIPMENT TESTING; FAILURE ANALYSIS; FATIGUE OF MATERIALS; MOISTURE; POLYCRYSTALS; SEMICONDUCTING SILICON; SINGLE CRYSTALS; STRENGTH OF MATERIALS;

FAILURE MODES; MECHANICAL LIMIT; MICROELECTROMECHANICAL SYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032302022     PISSN: 07347510     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)