Structure rotation and pull-in voltage control of MEMS lateral comb resonators under fault conditions

IEEE Transactions on Control Systems Technology

Volumn 17, Issue 1, 2009, Pages 51-59

  Izadian, Afsdian ^a   Hornak, Lawrence A ^a   Famouri, Parviz ^a  

^a West Virginia University   (United States)

Author keywords

Fault; Lateral comb resonator (LCR); Pull in voltage; Structure rotation; Variable structure control

Indexed keywords

DC MOTORS; ELECTRIC POTENTIAL; FADING (RADIO); FEEDBACK; PARAMETER ESTIMATION; REAL TIME CONTROL; REAL TIME SYSTEMS; RESONATORS; ROTATION; SPATIAL VARIABLES CONTROL; VARIABLE STRUCTURE CONTROL; VOLTAGE CONTROL; VOLTAGE REGULATORS;

CONTROL METHODS; DIFFERENT OPERATING CONDITIONS; DIRECTION OF THE MOVEMENTS; ESTIMATION BLOCKS; FAULT; FAULT CONDITIONS; LATERAL COMB RESONATOR (LCR); OPTICAL MONITORING; POSITION FEEDBACKS; PULL-IN VOLTAGE; SELF-TUNING; STRUCTURE ROTATION; SYMMETRIC STRUCTURES; TIME CONTROLS; UNSTABLE REGIONS; VARIABLE STRUCTURE CONTROLLERS; VOLTAGE LIMITS;

FORCE MEASUREMENT;

EID: 58249090807     PISSN: 10636536     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCST.2008.922568     Document Type: Article

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