Reliability enhancement of MEMS lateral comb resonators under fault conditions

IEEE Transactions on Control Systems Technology

Volumn 16, Issue 4, 2008, Pages 726-734

  Izadian, Afshin ^a   Famouri, Parviz ^a  

^a West Virginia University   (United States)

Author keywords

Lateral comb resonator (LCR); Model reference adaptive controllers (MRACs); Reliability enhancement; Trajectory control

Indexed keywords

COMPOSITE MICROMECHANICS; ELECTROMECHANICAL DEVICES; FORCE MEASUREMENT; MEMS; MICROELECTROMECHANICAL DEVICES; OPTICAL DESIGN; RESONATORS; SPRINGS (COMPONENTS);

(+ MOD 2N) OPERATION; (I ,J) CONDITIONS; ADDITIONAL MASS; CHIP-LEVEL; CONTROL EFFORT; DIFFERENT TYPES; ENVIRONMENTAL CONDITIONING; EXPERIMENT RESULTS; FAULT CONDITIONS; FAULT OCCURRENCE; FAULTY DEVICES; IN ORDER; MASS CHANGES; MICRO ELECTRO MECHANICAL SYSTEMS (MEMS); MODEL REFERENCE ADAPTIVE CONTROLLER (MRAS); RELIABILITY ENHANCEMENT; RELIABLE OPERATIONS; ROBUST SY STEMS; SAFE OPERATIONS; STRUCTURAL DEFECTS;

CONTROL SYSTEMS;

EID: 46849110986     PISSN: 10636536     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCST.2007.912233     Document Type: Article

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