MEMS feedback control using through-wafer optical device monitoring

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4178, Issue , 2000, Pages 221-231

  Dawson, Jeremy M ^a   Wang, Limin ^a   Chen, Jingdong ^a   Famouri, Parviz F ^a   Hornak, Lawrence A ^a  

^a WEST VIRGINIA UNIVERSITY   (United States)

Author keywords

Diffractive optics; Linear control; MEMS; Nonlinear sliding control; Optical metrology; Through wafer optics

Indexed keywords

ELECTROMECHANICAL DEVICES; FEEDBACK; FORCE MEASUREMENT; MEMS; PROPORTIONAL CONTROL SYSTEMS; TWO TERM CONTROL SYSTEMS;

DESIGN CONSIDERATIONS; INTEGRATED MICROSYSTEMS; INTEGRATED OPTICAL MONITORING; LATERAL COMB RESONATORS; MICRO ELECTROMECHANICAL SYSTEM (MEMS); MICRO-ELECTRO-MECHANICAL; MULTI-USER MEMS PROCESS; NONLINEAR PROPORTIONAL INTEGRAL;

CLOSED LOOP CONTROL SYSTEMS;

EID: 85088398658     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.396494     Document Type: Conference Paper

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