Development of a MEMS testing methodology

IEEE International Test Conference (TC)

Volumn , Issue , 1997, Pages 923-931

  Kolpekwar, Abhijeet ^a   Blanton, R D ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; COMPUTER AIDED DESIGN; COMPUTER SIMULATION; INTEGRATED CIRCUIT MANUFACTURE; INTEGRATED CIRCUIT TESTING; SENSORS; VLSI CIRCUITS;

FOLDED FLEXURE COMB DRIVE RESONATOR; MICROELECTROMECHANICAL SYSTEMS (MEMS);

MICROELECTROMECHANICAL DEVICES;

EID: 0031344126     PISSN: 10893539     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (18)