Through-wafer optical probe characterization for microelectromechanical systems positional state monitoring and feedback control

Optical Engineering

Volumn 39, Issue 12, 2000, Pages 3239-3246

  Dawson, J M ^a   Chen, J ^a   Brown, K S ^a   Famouri, P ^a   Hornak, L A ^a  

^a West Virginia University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FEEDBACK CONTROL; MICROMETERS; NONLINEAR CONTROL SYSTEMS;

MECHANICAL MICROSYSTEMS; OPTICAL METROLOGY; OPTICAL PROBES;

MICROELECTROMECHANICAL DEVICES;

EID: 0034427404     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1327177     Document Type: Article

References (23)

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