Grating-assisted optical microprobing of in-plane and out-of-plane displacements of microelectromechanical devices

Journal of Microelectromechanical Systems

Volumn 15, Issue 2, 2006, Pages 388-395

  Zhou, Guangya ^a   Chau, Fook Siong ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Displacement sensing; Grating light modulation; Interferometer; Microactuators; Microelectromechanical systems (MEMS)

Indexed keywords

DIFFRACTION GRATINGS; INTERFEROMETERS; INTERFEROMETRY; LIGHT MODULATION; MICROACTUATORS; OPTICAL RESOLVING POWER; OPTICAL RESONATORS; OPTICAL SENSORS;

DISPLACEMENT SENSING; GRAFTING LIGHT MODULATION; MICROMACHINED GRATING STRUCTURE; MODIFIED GRATING INTERFEROMETRY; OPTICAL INTENSITY MODULATION; OPTICAL MICROPROBING; OPTICAL SENSING METHOD; PHASE-SENSITIVE DIFFRACTION GRATING;

MICROELECTROMECHANICAL DEVICES;

EID: 33645752550     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.872234     Document Type: Article

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